Hitachi Microscope & Magnifier S-3400N User Manual
3.5 Operation for Image Observation
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As signals detected by a detector have the following characteristics, they should be selected
according to the intended purpose:
according to the intended purpose:
Table 3.5-1 General Characteristics of Detector-dependent Signals
Detector Characteristics Application
SE
(Secondary electron)
High resolution surface information
High edge contrast
Sensitive to specimen charging
Not suitable for the low-vacuum mode
Useful for making
morphological observations
on the specimen surface.
morphological observations
on the specimen surface.
BSE
(Backscattered
electron)
electron)
Sensitive to compositional information
Less sensitive to specimen charging
Less edge contrast
Permits observations in the low-
vacuum mode.
vacuum mode.
Useful in conducting
observations with edge
contrast suppressed,
observing specimen
composition information, or
reducing the charge-up
effect.
observations with edge
contrast suppressed,
observing specimen
composition information, or
reducing the charge-up
effect.
3.5.1.1 Secondary Electron Detector (SE)
Selecting the SE option on the DETECTOR block produces an observation image detected by
the secondary electron detector.
Because it uses a high voltage in its sensor, the secondary electron detector produces electric
discharges and cannot be used in the low-vacuum mode. When the low-vacuum mode is on, a
detector other than the secondary electron detector is automatically selected.
In SE detector menu, secondary electron collection efficiency can be changed by the slider, or
the combo box from 0 to 100. It is recommended to use with adjusting to the images lighten
most. The default value is 30, and the Reset button is pushed, it will return to a default value.
Fig. 3.5-2 SE Detector Menu