Hitachi Microscope & Magnifier S-3400N User Manual

3.5.7 

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3.5.7    Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage) 
 
The S-3400N Type II SEM provides a 5-axis motorized stage. 
 
 
3.5.7.1  Coordinate Notation 
 
S-3400N utilizes two coordinate notation systems, Stage (Mechanical) Coordinate and Sample 
Coordinate.  The Sample Coordinate system will be better for using the Rotation Assist 
function. The Stage Coordinate system is also available for users familiar with previous Hitachi 
SEMs using the Stage Coordinate system. 
 
(1)  Relationship of stage and Sample Coordinates 

Following is an example of a 5 inch diameter sample. 
On the Stage Coordinate system, the center of the sample is (X=60, Y=25 mm) and the 
origin is at the upper-left corner of XY movable area. 
On the Sample Coordinate system, the center of the sample is the origin (X=0, Y=0 mm) 
and the origin fits to it. 

 

 

（60, 25） 

(0, 0) 

(0, 50) 

（60, -26）

（9, 25） 

（100, 50）

(100, 0) 

（60, 76）

X 

Y 

∅102 mm sample 

Movable range of stage

(111, 25)

（100, 25） 

 

 

（0, 0） 

（-60, 25）

（-60, -25）

（40, 25）

(-60, 0)

（-51, 0） 

（40, 0） 

（40, -25） 

（0, -51） 

X 

Y 

∅102 mm sample 

Movable range of stage

（0, 51） 

 

 
Stage coordinates (mechanical coordinates) 

Sample coordinates 

 

Fig. 3.5-27    Relationship between the Two Coordinate Systems 

 
(2)  Switching coordinate systems 

Open the Optional Setup dialog window by selecting Stage command in Optional Setup 
menu. 
On the COORDINATE area, select Sample or Stage.  OK button will update the coordinate 
system.