Hitachi Microscope & Magnifier S-3400N User Manual

3.5    Operation for Image Observation 

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3.5.7.6    Z and Tilt Axis Operation 
 
(1)  Operation using the Z/TILT box of the Stage tab on the Operation Panel (coordinates 

specifications)  
When moving Z and Tilt axis by specifying a set of coordinates, use the Z and Tilt scrollbars 
to specify coordinates, and then click the GO button.    Z and Tilt axis coordinates can be set 
by input from the keyboard and then press ENTER key. 

 
(2)  Operation using the Z/TILT box of the Stage tab on the Operation Panel (continuous 

motion) 

It is possible to move the Z-axis continuously by holding down on the Continuous Move 

button 

 

. 

The speed of motion can be specified in four steps using the Speed slider. 
Similar operations can also be performed using the mouse on the screen, to be described 
later. 

 
(3)  Moving to an analysis position. 

By clicking the Analysis button, it is possible to move to the analysis position of WD=10 mm. 

 
(4)  Mouse operation on the scanning image   

It is advisable to use mouse operation on the scanning image for continuous operation of Z 
or Tilt axis. 
For further details, see 3.5.7.7 Mouse Operation of Stage on the Scanning Image. 

 
IMPORTANT:  Incorrect specimen size, height, and detector settings can damage the objective 

lens or the semiconductor BSE located on the underside of the objective lens, as 
well as the specimen itself.   

 
IMPORTANT:  To avoid inadvertently disabling the !Stop button, the GO button should not be 

pressed continuously when the stage is in motion.