Hitachi Microscope & Magnifier S-3400N User Manual

5.3 

5 - 3 

5.3  Spare Parts 
 
The items shown in Table 5.3-1 must be prepared for long-term operation. 
Select a proper quantity in consideration of the application of each part. 
 

Table 5.3-1   Spare Parts 

 

Part No. 

Part Name

 

Location Q’ty 

Used

52E-2012 

Accessory FUSE (W) set

 1set

433-3702 Specimen stub

15mm dia 

－

52E-4020 Specimen stub

26mm dia 

－

52E-4021 Specimen stub

32mm dia 

－

52E-4022 Specimen stub

51mm dia 

－

52E-4023 Specimen stub

77mm dia 

－

52E-4024 Specimen stub

102mm dia 

－

52E-4025 Specimen stub

127 mm dia 

－

52E-4026 Specimen stub

153 mm dia 

－

52E-4027 Specimen stub

200 mm dia 

－

L456825 O-ring AS568-235 FPM

For electron gun 1

L456711 O-ring AS568-012 FPM

For objective lens aperture 1

L456815 O-ring AS568-225 FPM

For specimen chamber port 

6

L456810 O-ring AS568-220 FPM

For specimen chamber 

1

L456818 O-ring AS568-228 FPM

For specimen chamber 

1

L456865 

O-ring AS568-275 FPM 

For specimen stage 

1