Hitachi Microscope & Magnifier S-3400N User Manual

6.4.5 

6 - 83 

6.4.5.3    Start of CD Measurement Function 
 

(1) 

In the case of the SEM main unit, click the CD Measurement button 

  on the tool 

button area of the Operation panel or select Measurement in the Analysis menu. 

To start on the SEM Data Manager, use Measure button 

  on the tool bar or Analysis - 

CD Measurement menu command. 
The CD Measurement window will open. 

 

   

 

 

Fig. 6.4-14    CD Measurement Window