Hitachi Microscope & Magnifier S-4800 Manual De Usuario

 

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3.5.6    Operation of the Specimen Stage (Type I - Manual Stage) 
 
The S-4800 type I SEM provides a 5-axis manual stage. 
 
3.5.6.1 Movable range and specimen exchange position 
 
The following table shows movable range and specimen exchange position. 
 

 

X 

0 to 50 mm 

25.0 mm 

Y 

0 to 50 mm 

25.0 mm 

R 

0 to 360° 

0° 

T 

-5 to 70° 

0° 

Z 

1.5 to 30 mm 

8.0 mm 

 
3.5.6.2 Movable range limitation of X, Y and R axes 
 
(1) When no optional detector is in its operation position, no limitation for a specimen smaller 

then 5 inches diameter. 
For 6 inches diameter, 100mm square and 125mm square, X axis range has no limitation and 
Y axis range is limited as 
・6mm  ≦ Y ≦ 50mm.  
 

(2) When the YAG type BSE detector has been inserted to its operating position, limit X axis 

range as follows. 
・smaller than 4 inches diameter : no limitation 
・5 inches diameter : 2mm  ≦ X ≦ 50mm 
・6 inches diameter : 15mm  ≦ X ≦ 50mm 
・100mm square : 15mm  ≦ X ≦ 50mm 
・125mm square : 15mm≦ X ≦ 50mm 
 

(3) For 125mm square specimen, Use rotation angle of 0,90,180 and 270 deg. only. 

And rotate R axis only at X=Y=25mm (center position). If rotate specimen at other X,Y 
position, specimen may hit the detector.