Hitachi Microscope & Magnifier S-4800 Manual De Usuario

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(4)   If you do not find any failure mentioned above, contact a service engineer. 
 
 
4.4.3    When Specimen Chamber Vacuum is not Good 
 
If HV applicable status (HV indicator on GUI blinks in yellow and ON button is enable) is not 
given even after about 1 to 1.5 hour has been passed from starting specimen chamber 
evacuation check the followings. 
 
(1) Check specimen chamber vacuum. It shall be better than 2x10-3Pa to apply HV. 

Note that in the period of 15 minutes after TMP NORMAL lamp is lit, HV does not becomes 
enable to be applied.   
 

(2)   If you attached some assembly unit, e.g. objective lens aperture unit, before starting 

evacuation, introduce air into the specimen chamber and detach the unit.    Clean up and 
grease up the O-ring of the unit and attach it again.    Then, start evacuation again. 
 

(3) Check if your specimen is not wet.    If the specimen is not dry, outgas from the specimen may 

cause long evacuation time.   
 

(4) If you do not find any failure mentioned above, contact a service engineer. 
 
 
4.4.4    When Ion Pump Vacuum Degraded 
 
When ion pump vacuum indicators are worse than the followings, carry out gun baking referring 
to instruction manual. 
        IP1:    2 x 10

-7

 Pa 

        IP2:    2 x 10

-6

 Pa 

        IP3:    5 x 10

-5

 Pa 

If these are not improved by gun baking, contact a service engineer. 
 

 

•

  Voltages up to 100 V AC and 30 kV DC are used in this 

instrument.    Touching the interior could cause an 
electric shock. 

•

  Never remove the covers of main unit, control unit or 

power unit and touch internal parts or circuits while 
power is connected to the instrument.    There is a 
danger of fatal or serious injury due to electric shock. 

•

  Do not detach the covers of the instrument.