Hitachi Microscope & Magnifier S-4800 Manual De Usuario

4-

20

Set the APT HEATER switch to AUTO.   
 

(6) For ion pumps vacuum recovery, usually half to one day is necessary. (it is shorter when 

short period power down) 
Check ion pump vacuum after waiting above time. If it is degraded than the following value, 
gun baking operation is necessary.   
IP1 :  2 

×

 10-7 Pa 

IP2 :  2 

×

 10-6 Pa 

IP3 :  5 

×

 10-5 Pa     

 

(7) After recovery of ion pump and specimen chamber vacuum you may start image observation.   

Supply cooling water or start water circulator before starting Display power.     
If the water circulator is linked with SEM power, it will be started when the Display power 
turned ON. 
 

 
4.8    Operation when power line failure recovered   
 
Use the same steps as above 4.6. 

 

 
4.9    Operation when Water supply stopped by failure   
 
When cooling water stops while the Display power is ON, E-12 error will be shown on the 
evacuation control panel and buzzer sounds.   
Close S-4800 control program. If water recovery needs long tome, also shut down    PC and turn 
the Display power off.    He error and buzzer will be terminated.   
No operation is necessary for evacuation system.   
You may start operation when water supply is recovered.