Hitachi Microscope & Magnifier S-4800 Manual De Usuario

PRECAUTION - 8  

Specifications for Hitachi Model S-4800, Field Emission Scanning Electron Microscope 
 
1.  Resolution: 
 
Accelerating voltage 15 kV 
Working distance = 4 mm .............................. 1.0 nm 
Accelerating voltage 1 kV 
Working distance = 1.5 mm ........................... 2.0 nm 
 
 
2.  Magnification: 
 
High magnification mode ............................... 100

×

 to 800,000

×

 

Low magnification mode ................................ 30

×

 to 2,000

×

 

 
 
3.  Electron Optics: 
 
(1)  Electron gun .......................................... Cold cathode field emission type 
 
(2)  Extracting voltage (Vext) ....................... 0 to 6.5 kV 
 
(3)  Accelerating voltage (Vacc)................... 0.5 to 30 kV (in 100 V steps) 
 
(4)  Lens....................................................... 3-stage electromagnetic lens, reduction type 
 
(5)  Objective lens aperture.......................... Movable aperture (4 openings selectable/ 

alignable outside column).     
Self-cleaning thin aperture 

 
(6)  Astigmatism correction coil   
 (stigmator) ............................................. Electromagnetic 

type 

 
(7)  Scanning coil ......................................... 2-stage electromagnetic-deflection type