Keithley 6487/E Digital-Multimeter, DMM, 6487/E Fiche De Données

Codes de produits

6487/E

W L

L M

E & S

A Greater Measure of Confidence

www.keithley.com

1.888.KEITHLEY

(U.S. only)

When do you need a

picoammeter?
Measuring low DC currents often
demands a lot more than a digital
multimeter can deliver. Generally,
DMMs lack the sensitivity required
to measure currents less than
100nA. Even at higher currents,
a DMM’s input voltage drop
(voltage burden) of hun dreds
of millivolts can make accurate
current measurements impossible.
Electrometers can measure low
currents very accu rately, but the
circuitry needed to measure
extremely low currents, combined
with functions like voltage,
resistance, and charge measure-
ment, can increase an electrom-
eter’s cost significantly. The Model
6487 Picoammeter/Voltage
Source combines the economy
and ease of use of a DMM with
low current sensitivity near that of
an electrometer.

Monitoring and Control of focused Ion beam Currents
In semiconductor fabrication, focused ion beam systems are often used for nanometer-scale imaging,

micromachining, and mapping . Careful monitoring of the magnitude of the beam current with an

ion detector is critical . The ion detector generates a secondary current that’s proportional to the

current of the primary ion beam . When this secondary current is measured, it can be used to control

the intensity of the primary beam . However, this secondary current is very low, often just a few

picoamps, so the instrumentation measuring it must provide high measurement accuracy and repeat-

ability, as well as sub-picoamp resolution . The Model 6487’s wide measurement range and 5½-digit

resolution make it ideal for this application . Signal connections to the Model 6487 are made through

the instrument’s triax connector . Often, a detector may require high voltage to attract ions, making

the 6487’s 500V source a necessity .

6487

Picoammeter/Voltage Source

Ion

Detector

Ion Beam

6487 Picoammeter/

Voltage Source

Metal Shield

Ammeter

source

aCCEssorIEs aVaIlablE

6487

Picoammeter/ Voltage Source

High resistance Measurements
The Model 6487 Picoammeter can be used to

measure high resistances (>1G

W) in applications

such as insulation resistance testing . A constant

voltage is placed in series with the unknown

resistance and the picoammeter . The voltage

drop across the picoammeter is negligible, so

all the voltage appears across the unknown

resistance . The resulting current is measured by

the picoammeter and the resistance is calculated

using Ohm’s Law (R = V/I) . To prevent generated

current due to electrostatic interference, the

unknown resistance is housed in a shielded test

fixture . A small series resistor may be added to

reduce noise if the un known resistor has high

stray capacitance across it .

sErVICEs aVaIlablE

6487-3Y-EW

1-year factory warranty extended to 3 years
from date of shipment

C/6487-3Y-ISO

3 (ISO-17025 accredited) calibrations within 3
years of purchase*

*Not available in all countries

CablEs
6517-ILC-3 Interlock Cable for 8009 Resistivity Test Fixture
7007-1

Shielded IEEE-488 Cable, 1m (3 .3 ft)

7007-2

Shielded IEEE-488 Cable, 2m (6 .6 ft)

7007-4

Shielded IEEE-488 Cable, 4m (13 .1 ft)

7078-TRX-10 Low Noise Triax Cable, 3 .0m (10 ft)
7078-TRX-20 Low Noise Triax Cable, 6 .0m (20 ft)
8501-*

Trigger Link Cable with male Micro-DIN connectors
at each end, 1m or 2m (3 .3 ft or 6 .6 ft)

aDaPTErs
237-TRX-BAR Triax Barrel
7078-TRX-BNC Triax-to-BNC Adapter

TEsT fIXTurEs
8009

Resistivity Test Fixture

raCK MouNT KITs
4288-*

Single or Dual Fixed Rack Mounting Kit

GPIb INTErfaCEs
KPCI-488LPA IEEE-488 Interface/Controller for the PCI Bus
KUSB-488B IEEE-488 USB-to-GPIB Interface Adapter

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