Sensirion 1-100353-01 EM1 H Mass Flow Meter for Gases 1-100353-01 データシート

®

 EM1 Mass Flow Meter for Gases

                                                                               

 

www.sensirion.com  

Sensirion - the sensor company

 

 
 
− CMOSens

®

 technology 

− Unbeatable price/performance ratio 

−  High output data speed (up to 200 Hz) 
−  Wide dynamic range (1:100 with 3% m.v. accuracy) 

−  Various maximum flow ranges: up to 200 ln/min (FS) 
−  Digitally calibrated & temperature compensated 

 

− RS232 interface 

− RoHS compliant

 

 
 
 
 

®

The CMOSens

®

 EM1 Mass Flow Meter (MFM) enables 

fast and economical measurement of gas flows over a 
very wide dynamic range. Its leading price/performance 
ratio is based on Sensirion’s unsurpassed CMOSens

®

 

sensor technology which combines a sensor element 
with the amplification and A/D converter circuit on one 
single CMOS chip. This results in good performance, 
fast response time and large dynamic range at very 
attractive cost. 
All measurement data is fully calibrated and temperature 
compensated by means of an internal micro controller. 

Mounted in rugged, chemically inert housing the 
CMOSens

®

 EM1 Mass Flow Meter is suitable for a wide 

range of applications. Such include mass flow metering 
for process control, medical applications and fuel cells. 
The sensor housing provides two inlets for measuring 
the gas flow and withstands overpressures of 8 bar 
(116 psi). 
The CMOSens

®

 EM1 Mass Flow Meter requires a 

supply voltage of 7-18 Vdc and provides an RS232 
electrical interface. 
EM1 is RoHS compliant.  
 
 

 
 

 

 

Figure 1: Block Diagram CMOSens

®

 EM1 Mass Flow Meter. 

v 2.8 / August 2007