Sensirion 1-100353-01 EM1 H Mass Flow Meter for Gases 1-100353-01 データシート
製品コード
1-100353-01
CMOSens
®
EM1 Mass Flow Meter for Gases
www.sensirion.com
Data Sheet EM1 - v 2.8 / August 2007
2 / 14
Introductory Description
The heart of the CMOSens
®
Mass Flow Meter is
powered by Sensirion’s unsurpassed CMOSens
®
sensor
technology. The CMOSens
®
EM1 Mass Flow Meter
therefore provides unbeatable performance at very
attractive system cost. One single device covers a range
of 0.05 ln/min up to 200 ln/min .
The CMOSens
attractive system cost. One single device covers a range
of 0.05 ln/min up to 200 ln/min .
The CMOSens
®
EM1 runs with an internal flow
integration time of 5ms. This allows correct measurement
and display of fast changing signals. But very often a
precise total flow over a longer period is of higher interest
than a fast single measurement. For this purpose the
CMOSens
and display of fast changing signals. But very often a
precise total flow over a longer period is of higher interest
than a fast single measurement. For this purpose the
CMOSens
®
EM1 Mass Flow Meter can be set to slower
read out times (see
Table
4
). The sensor internally still integrates in 5 ms
slices and recognizes fast signal changes but for the read
out the total flow over the whole period is calculated. The
CMOSens
out the total flow over the whole period is calculated. The
CMOSens
®
Mass Flow Meter therefore is exceptionally
well suited for difficult measurement conditions when fast
changing gas flows must be monitored and summed up
precisely.
changing gas flows must be monitored and summed up
precisely.
The CMOSens
®
EM1 Mass Flow Meter measures true
mass flow independent of the ambient temperature and
pressure changes. You simply connect the gas to be
measured to the CMOSens
pressure changes. You simply connect the gas to be
measured to the CMOSens
®
EM1 device to get an
instantaneous gas mass flow integral with a selectable
integration time between 5 ms and 640 ms. Depending
on the type a flow range between 0.1 ln/min and up to
200 ln/min can directly be measured by connecting the
CMOSens
integration time between 5 ms and 640 ms. Depending
on the type a flow range between 0.1 ln/min and up to
200 ln/min can directly be measured by connecting the
CMOSens
®
EM1 Mass Flow Meter.
In addition to mass flow, the CMOSens
®
EM1 device
provides information about the temperature on the
CMOSens
CMOSens
®
sensor element. Both mass flow and
temperature data are accessed through an RS232
interface. The RS232 interface allows you to directly
connect the CMOSens
interface. The RS232 interface allows you to directly
connect the CMOSens
®
EM1 Mass Flow Meter to a PC.
If a special interface such as 4-20 mA current output or
other or another flow range is required, contact Sensirion
for a customer specific solution.
other or another flow range is required, contact Sensirion
for a customer specific solution.
Please contact Sensirion before using any corrosive,
toxic or explosive gas types (see also section 1.6 and
1.7). However, the standard calibration gas is
nitrogen. Please contact Sensirion, if you would like to
use the sensor for applications with other gases.
A free PC software to read out the CMOSens
toxic or explosive gas types (see also section 1.6 and
1.7). However, the standard calibration gas is
nitrogen. Please contact Sensirion, if you would like to
use the sensor for applications with other gases.
A free PC software to read out the CMOSens
®
EM1
Mass Flow Meter can be downloaded from
www.sensirion.com.
www.sensirion.com.
CMOSens
®
sensor technology
CMOSens
®
is the base technology for all Sensirion
multi sensor modules and sensor systems. The
unification of semiconductor chip and sensor
technology serves as a platform for highly integrated
system solutions with excellent sensor precision and
reliability. With CMOSens
unification of semiconductor chip and sensor
technology serves as a platform for highly integrated
system solutions with excellent sensor precision and
reliability. With CMOSens
®
, the on-chip sensor
element forms an integrated whole with a high-end
amplification and A/D converter circuit. Due to the
compact single-chip design, CMOSens
amplification and A/D converter circuit. Due to the
compact single-chip design, CMOSens
®
based
sensors are very resistant to electromagnetic
disturbances (EMC), another important technical
advantage of this state of the art sensor technology.
As a result, CMOSens
disturbances (EMC), another important technical
advantage of this state of the art sensor technology.
As a result, CMOSens
®
based multi sensor modules
offer excellent sensor precision, fast response time
and a very large dynamic measurement range. In
addition, the digital intelligence of the CMOSens
and a very large dynamic measurement range. In
addition, the digital intelligence of the CMOSens
®
sensor technology enables digital interfaces that
permit an easy link with the system of the customer, a
real advantage and benefit that results in ready-to-use
problem solutions.
permit an easy link with the system of the customer, a
real advantage and benefit that results in ready-to-use
problem solutions.