Olicom 9600 ユーザーズマニュアル

9600 Compressor Installation, Operation, and Maintenance

P/N 8040540

6

Table of Contents (continued)

Appendix A - Customer Support Information

Appendix B - Flow Diagram

Appendix C - Troubleshooting Procedures

Appendix D - Schematic

Figure 1-1: 9600 Compressor   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  1-3
Figure 1-2: 9600 Compressor Dimensions   . . . . . . . . . . . . . . . . . . . . . . . . . . . .  1-4
Figure 1-3: Water Flow Rate versus Pressure Drop   . . . . . . . . . . . . . . . . . . . . .  1-6
Figure 1-4: 9600 Compressor Rear View Component Locations  . . . . . . . . . . .  1-8
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps .  1-12
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps    1-13

Figure 2-1: Using the Shipping Carton Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Figure 3-1: 9600 Compressor Installation Flowchart   . . . . . . . . . . . . . . . . . . . .  3-2
Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed)  . .  3-5
Figure 3-3: Connecting/Disconnecting Helium Flex Line Self
                  Sealing Couplings   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  3-8
Figure 3-4: Single On-Board Cryopump Connections   . . . . . . . . . . . . . . . . . . .  3-9
Figure 3-5: Single Cryo-Torr Cryopump Installation  . . . . . . . . . . . . . . . . . . .  3-10
Figure 3-6: Recommended Multiple On-Board Cryopump or
                  Waterpump Installation (Splitter Box located at Process Tool)  . .  3-12
Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation

(Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . 3-13

Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation . . . . . 3-15
Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation . . . . . . . . 3-16