Hitachi Microscope & Magnifier S-3400N User Manual

1.1 Specifications

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1.1.4 Specimen Goniometer Stage

(a)

Type I (80 x 40 stage)
Range of motion:

X-axis: 0 to 80 mm

Y-axis: 0 to 40 mm

Z-axis (WD): 5 to 35 mm

R-axis (rotation): 360°, continuous

T-axis (tilt): -20° to 90°

Drive method:

Manual drive

Specimen size observable over entire region: 106 mm diameter (also R)
Maximum specimen size:

200 mm diameter

(b)

Type II (100 x 50 stage)
Range of motion:

X-axis: 0 to 100 mm

Y-axis: 0 to 50 mm

Z-axis (WD): 5 to 65 mm

R-axis (rotation): 360°, continuous

T-axis (tilt): -20°to 90°

Drive method:

5-axis motor drive

With eucentric rotation feature

With image navigation feature

Specimen size observable over entire region: 130 mm diameter (also R)
Maximum specimen size:

200 mm diameter

1.1.5 Evacuation System

Evacuation control:

Fully automatic pneumatic valve method

Vacuum gauge:

Pirani gauge

Attainable vacuum level:

1.5 x 10

-3

Range of vacuum level settings: 6 to 270 Pa (22 stops)
Vacuum pump:

Turbo molecular pump (TMP) 210 L/s for high vacuum 1 ea.

Rotary pump 135 L/min (50Hz), 162 L/min (60Hz)

TMP back evacuation/low-vacuum settings 1 ea.

Compressor:

0.2 kW output, 1 ea.

1.1.6 Imaging Function
Display monitor:

Still image display on the PC monitor (at full scanning speed)

Observation monitor:

18.1- or 19-inch LCD (number of desktop pixels: 1280 x 1024)

Image display mode:

Full-screen display (1280 x 960 pixels)

Small-screen display (640 x 480 pixels)

Dual-screen display (640 x 480 pixels, two panes), with
signal-mixing feature