Hitachi Microscope & Magnifier S-4800 Manual De Usuario

 

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be shown. 
 
(a) When the present position is 2mm or less near to the X or Y limit 

 

                                         

   

 
OK rotates the stage and move X and Y axes so as the specified point comes under the 
beam. 

(b) When the present position is 2mm or more far from the X and Y limit 

 

                                         

 

 
In this case, stage is not rotated. 
 
In above cases, computer calculates X and Y coordinates to move the target or present 
position under the beam using specified angle and deviance of the mechanical rotation 
center from the ideal center. Possibly the resulted X or Y coordinate may be out of its 
movable range. In such a case, a message indicating that the rotation assist unable is 
shown and stage rotation is canceled. 
 
 

The rotation eucentric function is to keep the present field of view after specimen rotation. It 
calculates XY position that recovers the present viewing position after rotation axis is driven using 
the present XY position and the angle to be rotated. XY axes are driven to the calculated point 
together with rotation axis.     
In addition, the tilt eucentric function drives XY axes together with Tilt axis so that the previous 
viewing point will be kept after tilting operation.   
To improve accuracy of the functions, calibration of the following error factors are provided. 

 

(a)  Measure and correct the deviation between rotation center axis and beam irradiation 

position.  

(b)  Measure and correct the deviation between tilt center axis and beam irradiation position. 
(c)  Measure the specimen height error and compensate the rotation center and the tilt center 

axes.