Sensirion 1-100353-01 EM1 H Mass Flow Meter for Gases 1-100353-01 データシート

CMOSens

®

 EM1 Mass Flow Meter for Gases 

 

www.sensirion.com  

Data Sheet EM1 - v 2.8 / August 2007 

 

4 / 14 

Table 3: Additional Specifications of EM1 Mass Flow Meter – all flow ranges. 

Temperature Sensor (measured media) 
Dynamic Range 

 

0 – 60 / 32 – 140 

°C / °F 

Resolution  

0.1 

K 

Accuracy  

2 

K 

Electrical 
Output  

RS 

232 

 

Supply Voltage 

 

+ 7 – + 18 

VDC 

Electrical Connector 

 

Molex 

 

Mechanical 
Length 

 

13.6 / 5.35 

cm / inch 

Width 

 

4.4 / 1.73 

cm / inch 

Height 

 

8.18 / 3.2 

cm / inch 

Weight (straight / angle connector) 

 

165 / 105 

g 

Mechanical Connector 

 

G 3/8 

inch 

Maximum Operating Pressure

1

 

 

8 / 116 

bar / psi 

Burst Pressure 

 

40 / 580 

bar / psi 

Leak-Integrity 

 

1 x 10 e-4 

mbar l/s He 

Material 
Wetted Materials 

Si, Si

3

N

4

, SiOx, Gold, Viton

®

, Epoxy, Glob Top, Polycarbonate 

 

RoHS / WEEE compliance 

 

Yes. 

 

 

Table 4: CMOSens

®

 EM1 Mass Flow Meter Resolution (EM1_V) at different Flow Levels and integration time. 

Flow Level 

200 ln/min  

13 ln/min  

3.5 ln/min  

0.9 ln/min  

0.11 ln/min  

50 ln/min  

4.0 ln/min  

1.0 ln/min  

0.3 ln/min  

0.03 ln/min  

< 5 ln/min  

1.0 ln/min  

0.25 ln/min  

0.06 ln/min  

0.0143 ln/min  

Mass Flow Integration Time 

 

5 ms 

20 ms 

80 ms 

640 ms 

 

1 

12.0 bar / 174 psi for short time operation, higher values for volume applications on request