Olicom 9600 ユーザーズマニュアル
9600 Compressor Description
1-12
P/N 8040540
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps
NOTE: Your installation (number of pumps per compressor) will vary
based upon the On-Board Cryopumps or Waterpumps used. Refer to
Appendix A to consult your local CTI-CRYOGENICS Customer Support
Center for information on specific compressor/pump applications.
based upon the On-Board Cryopumps or Waterpumps used. Refer to
Appendix A to consult your local CTI-CRYOGENICS Customer Support
Center for information on specific compressor/pump applications.
HELIUM SUPPLY
HELIUM RETURN
WATER
POWER
ON-BOARD POWER
CABLE
REMOTE
ON-BOARD SPLITTER
BOX