Olicom 9600 ユーザーズマニュアル
9600 Compressor Installation, Operation, and Maintenance
P/N 8040540
1-13
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Multiple Cryo-Torr Cryopump Connections
The Cryo-Torr Interface permits the connection of multiple
Cryo-Torr Cryopumps to one Compressor as shown in Figure 1-6.
Refer to Section 3 - Installation for more information on connecting
single or multiple Cryo-Torr Cryopumps to the Compressor.
Cryo-Torr Cryopumps to one Compressor as shown in Figure 1-6.
Refer to Section 3 - Installation for more information on connecting
single or multiple Cryo-Torr Cryopumps to the Compressor.
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps
NOTE: Your installation (number of pumps per compressor) will vary
based upon the Cryo-Torr Cryopump models used. Refer to Appendix A to
consult your local CTI-CRYOGENICS Customer Support Center for
information on specific compressor/cryopump applications.
based upon the Cryo-Torr Cryopump models used. Refer to Appendix A to
consult your local CTI-CRYOGENICS Customer Support Center for
information on specific compressor/cryopump applications.
CRYOPUMP POWER
CABLE
USER REMOTE
(FROM VACUUM SYSTEM)
HELIUM SUPPLY
HELIUM RETURN
WATER
POWER
CRYO-TORR
INTERFACE
REMOTE