Olicom 9600 ユーザーズマニュアル
9600 Compressor Installation, Operation, and Maintenance
P/N 8040540
3-9
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Single On-Board Cryopump Connections
CAUTION
Make sure the Compressor power is OFF before making any
connections to the rear panel.
connections to the rear panel.
1. Connect the Supply and Return lines to the 9600 Compressor as
described in Connecting/Disconnecting Helium Flex Lines
within this section.
within this section.
2. Connect one end of the Cryopump cold head cable to the
CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor as shown in Figure 3-4.
Compressor as shown in Figure 3-4.
3. Connect the opposite end of the cold head cable to the cryopump
cold head cable connector.
Figure 3-4: Single On-Board Cryopump Connections
HELIUM SUPPLY
HELIUM RETURN
WATER
POWER
ON-BOARD
POWER CABLE
REMOTE