用户手册 — Apex Digital 5708009-C

目录

• All information herein is subject to periodic updates. Inquiries concerning this manual should be...

  4
• is a registered trademark of Advanced Energy Industries, Inc.

  4
• 2000© Copyright by Advanced Energy Industries Inc. All rights reserved. Without written permissio...

  4
• Advanced Energy Industries, Inc.

  4
• 1625 Sharp Point Drive

  4
• Fort Collins, Colorado 80525 USA

  4
  • Table of Contents

    5
  • List of Figures

    9
  • List of Tables

    11
• Introduction

  13
  • This chapter contains several kinds of introductory information.

    13
  • Read This Section!

    13
    • To ensure safe operation, you should read and understand this manual before you attempt to instal...

      13
  • Using this Manual to Find Information for Your Generator

    13
    • The Apex generator can be ordered with many configurable options such as different output levels,...

      13
  • Understanding PIN Numbers and Apex Configuration

    13
    • The options installed on any Apex generator (that is, the configuration of the generator) are def...

      13
      • Figure 1-1. Serial number identification tag

        14
    • The PIN is a 17-position alpha-numeric that represents the configuration of your generator and id...

      14
    • Configuration positions— A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

      14
      • The “A” that precedes the PIN defines the product as an Apex generator, and it is not counted as ...

        14
  • Using the PIN to Locate Information in the Manual

    14
    • This manual uses the PIN to help you identify the manual sections that apply to your unit. To beg...

      14
    • Once you have located the PIN, you are ready to begin using the manual.

      14
    • The manual provides two basic tools to help you use the PIN in locating correct information for y...

      14
      • This section of the manual provides information for the: DeviceNet option PIN position 6, (A 1 2 ...

        15
      • Figure 1-2. Example configuration note

        15
  • Using the PIN to Identify Apex Options

    15
    • Table 1-1 shows all the options associated with each PIN position. When appropriate, it also prov...

      15
    • Table 1-1. Apex PIN Positions and Associated Options

      16
    • 1

      16
      • Output frequency

        16
      • 0—N/A

        16
      • 1—4 MHZ, ±0.005%

        16
      • 2—12.56 MHz, ±0.005%

        16
      • 3—13.56 MHZ, ±0.005%

        16
      • 4—27.12 MHz, ±0.005%

        16
      • 5—40.68 MHz, ±0.005%

        16
      • For more information on frequency and other specifications, see “Electrical Specifications” on pa...

        16
    • 2

      16
      • Power output

        16
      • A—1000 W

        16
      • B—1500 W

        16
      • C—2000 W

        16
      • D—3000 W

        16
      • E—4000 W

        16
      • F—5500 W

        16
      • G—8000 W

        16
      • H—10000 W

        16
      • J—5000 W

        16
      • K—1000 HALO

        16
      • L—1500 HALO

        16
      • M—3500 W

        16
      • N—7000 W

        16
      • For more information on power output and other specifications, see “Electrical Specifications” on...

        16
    • 3

      17
      • Input voltage

        17
      • 0—208 V nominal, 187 to 229 Vac, 3f, 47 to 63 Hz, with breaker

        17
      • 1—400 V nominal, 360 to 440 Vac, 3f, 47 to 63 Hz, with breaker

        17
      • 2—reserved

        17
      • 3—208 V nominal, 187 to 229 Vac, 3f, 47 to 63 Hz, without breaker

        17
      • 4—400 V nominal, 360 to 440 Vac, 3f, 47 to 63 Hz, without breaker

        17
      • 5—220,208 to 229 Vac, 1 phase, 47/63 Hz w/o breaker

        17
      • For more information on input voltage and other specifications, see “Electrical Specifications” o...

        17
    • 4

      17
      • Packaging

        17
      • A—frame mount (£ 5500 W)

        17
      • B—frame mount with rack ears (1/2 rack) (utilities)

        17
      • C—integrated rack mount

        17
      • D—1/2 integrated rack mount (left)

        17
      • E—1/2 integrated rack mount (right)

        17
      • F—exclusive option #1

        17
      • G—exclusive option #2

        17
      • H—exclusive option #3

        17
      • J—exclusive option #4

        17
      • K—on board frame mount, opposite end LED’s

        17
      • L—on board frame mount, opposite end LED’s w/4 handles

        17
      • M—on board frame mount, opposite end LED’s w/2 handles

        17
      • N—frame mount w/ rack ears (1/2 rack) (opposite)

        17
    • 5

      18
      • Panel

        18
      • 0—none (on-board, frame mount)

        18
      • 1—integrated rack mount with blank panel

        18
      • 2—integrated rack mount with passive digital display (see “Apex Status Indicators (LEDs)” on page...

        18
      • 3—N/A

        18
      • 4—exclusive option #1

        18
      • For panel illustrations, see “Apex Panel Illustrations” on page480.

        18
    • 6

      18
      • Serial I/O

        18
      • 0—default (RS-232 with AE Bus) (see “Host Port—RS- 232 With AE Bus” on page437)

        18
      • 1—Multidrop RS-485 with AE Bus (Currently NOT available)

        18
      • 2—DeviceNet (see “Host Port—DeviceNet” on page472)

        18
      • 3—Profibus (see “Host Port—Profibus” on page458)

        18
      • 4—exclusive option #1

        18
      • 5—DeviceNet (serial)

        18
      • 6—exclusive option #3

        18
      • 7—exclusive option #2

        18
    • 7

      18
      • Serial Port 2

        18
      • 0—default (no secondary serial port)

        18
      • 1—RS 232

        18
      • 2—RS 485

        18
    • 8

      19
      • User port options

        19
      • A—no User port

        19
      • B—25-pin APEX standard (see “25-Pin Apex Standard User Port” on page42)

        19
      • C—25-pin custom RFG compatible

        19
      • D—15-pin, exclusive option #2 (see “15-Pin User Port (Exclusive—Option D)” on page416)

        19
      • E—15-pin, exclusive option #3 (see “15-Pin User Port (Exclusive—Option E)” on page426)

        19
      • F—N/A

        19
      • G—exclusive option #4

        19
    • 9

      19
      • Output impedance

        19
      • A—50 W

        19
      • B—exclusive option #1

        19
      • C—exclusive option #2

        19
      • D—exclusive option #5

        19
      • E—exclusive option #6

        19
      • F—exclusive option #3

        19
      • G—exclusive option #4

        19
      • H— exclusive option #7

        19
      • J—exclusive option #8

        19
    • 10

      19
      • On-board RF output connector location

        19
      • 0—opposite end from water connections

        19
      • 1—utilities end (near water connections)

        19
    • 11

      20
      • Output connector

        20
      • 0—exclusive option #1

        20
      • 1—7/16 connector)

        20
      • 2—SQS‘ connector

        20
      • 3—LC connector

        20
      • 4—HN

        20
      • 5—N

        20
      • 6—exclusive option #2

        20
      • For further information see “Connecting Output Power” on page55.

        20
    • 12

      20
      • RF measurement

        20
      • 0—directional coupler

        20
      • 1—V/I sensor

        20
    • 13

      20
      • AC power input

        20
      • A—ODU connector (see “ODU Connector” on page57)

        20
      • B—Non-terminated 3 m, 4-conductor, shielded pigtail (see “NonTerminated, four-Conductor Pigtail” ...

        20
      • C—Non-terminated 12¢, 4-conductor, pigtail (see “NonTerminated, four-Conductor Pigtail” on page58)

        20
      • D—Harting Type Han-Q (see “Harting Type Han-Q Connector” on page59)

        20
      • E—4-terminal, stud mount

        20
      • F—15´ 4-conductor, with a Hubbell CS8365C plug

        20
      • G—5´ Harting

        20
      • H—Term 3m, 4 cond, shielded pigtail Marinco 3015P

        20
      • J—5’ terminated, 4 conductor, SH with contact LS1 BF.F6 5+PE (30A)

        20
      • K—ODU connector with 20 degree rotation

        20
      • L—Harting Type Han-Q (16A) rotated 180 degrees

        20
      • M—6’,4 conductor with #10 ring lugs on each wire

        20
    • 14

      20
      • Pulsing

        20
      • 0—no pulsing

        20
      • 1—pulse (see “Understanding and Setting Up Pulsing Output” on page513)

        20
    • 15

      21
      • CEX

        21
      • 0—default (no CEX)

        21
      • 1—CEX add (see “To Use the Common Exciter (CEX) Feature (optional)” on page512)

        21
      • 2—CEX w/1 Meter Cable (see “To Use the Common Exciter (CEX) Feature (optional)” on page512)

        21
    • 16

      21
      • Water fitting threads

        21
      • 0—default to 3/8 BSP female (metric threads)

        21
      • 1—3/8 NPT female

        21
      • 2—3/8 BSP to 1/2" NPT

        21
      • For information on connecting the water, see “Connecting Cooling Water” on page54.

        21
    • 17

      21
      • Custom configuration

        21
      • A—standard configurations

        21
      • B—exclusive option #1

        21
      • C—exclusive option #2

        21
      • D—exclusive option #3

        21
      • E—exclusive option #4

        21
  • Interpreting the Manual and Unit Labels

    21
    • The following sections provide information to help you interpret the use of type in the manual as...

      21
  • Type Conventions

    21
    • To help you quickly find what is being discussed, the manual presents certain words and phrases i...

      21
  • Icons (Symbols)

    22
    • This symbol represents important notes concerning potential harm to people, this unit, or associa...

      22
    • We include this symbol in Danger, Warning, and Caution boxes to identify specific levels of hazar...

      22
    • The following symbols could appear on labels on your unit.

      22
    • Capacitor charge

      23
    • Hazardous Voltage

      23
  • Safety

    24
    • Do not attempt to install or operate this equipment if you have not first acquired proper training.

      24
  • Product Safety/Compliance

    24
    • Certain options of the Apex have been tested for and comply with the following Directives and Sta...

      24
  • Directives and Standards

    25
    • The following tables list the Electromagnetic Compatibility (EMC) and Safety directives and stand...

      25
    • Table 1-2. Electromagnetic Compatibility (EMC)

      25
    • 89/336/EEC

      25
    • EC Council directive on the approximation of the laws of the Member States relating to electromag...

      25
    • 47 CFR Part 18

      25
    • Code of Federal Regulations - Limits and Methods of Measurement of Radio Interference Characteris...

      25
    • EN 50082-2

      25
    • Electromagnetic Compatibility (Generic Immunity Standard— Industrial)

      25
    • EN 55011

      25
    • Limits and Methods of Measurement of Radio Disturbance Characteristics of Industrial, Scientific,...

      25
    • Table 1-3. Safety

      25
    • 73/23/EEC

      25
    • EC Council directive on the harmonization of the laws of the Member States relating to electrical...

      25
    • SEMI S2-0200

      25
    • Safety Guidelines for Semiconductor Manufacturing Equipment

      25
    • UL 1012

      25
    • Power units other than class 2

      25
    • EN 50178

      25
    • Electronic Equipment For Use In Electrical Power Installations

      25
    • CSA C22.2 No. 107.1-95

      25
    • General Use Power Supplies—Industrial Products

      25
    • This device must be installed and used only in compliance with the standards listed in addition t...

      25
  • Certification

    26
    • Certain options of this product are certified by:

      26
    • For more information, refer to the letter of conformance (US) or declaration of conformity (EU) a...

      26
  • Installation Requirements

    27
    • In order for proper installation to be completed on the Apex generator, please take note of the f...

      27
  • Conditions of Use

    28
    • To be in compliance with the stated directives and standards, you must meet the following conditi...

      28
• Theory

  29
  • General Description

    29
    • The Apex™ product line consisting of generators and delivery system products defined by a matrix ...

      29
    • The Apex products can be configured to three basic package styles. The Apex products may be confi...

      29
    • Other optional features include high repetition rate, variable duty cycle pulsing and common exci...

      29
  • Functional Description

    29
    • In the following section, an overview of the functional description about the Apex products is di...

      29
  • Regulation

    29
    • The Apex generator regulates on forward power, delivered power, or bias voltage measured at the o...

      29
  • Cooling

    29
    • Apex generators are water-cooled only.

      29
  • Interlock

    30
    • The Apex generator provides a system interlock connection through the User port. The RF output co...

      30
  • Optional Water Solenoid

    30
    • The Apex generator provides water solenoid control circuitry that can be accessed through a conne...

      30
  • Grounding

    30
    • The Apex generator has two holes located on the rear panel to attach the system RF ground to. One...

      30
  • Protection

    30
    • The Apex generator protects itself from damage from the following conditions.

      30
  • Theory of Operation

    30
    • In this section a bock diagram is designed to help the User understand the process by which the A...

      30
      • Figure 2-1. Theory of operation block diagram

        31
    • Table 2-1. Block Diagram Explanation

      31
    • (1) User port (Analog I/O)

      31
    • This section provides user interface and CEX functions.

      31
    • (2) Driver/Exciter

      31
    • This section generates power at the designated output frequency to drive the main RF sections.

      31
    • (3) RF Amplifier

      31
    • This section generates RF power.

      31
    • (4) RF Measurement

      31
    • This section samples the output signal and sends it to the sensor electronics.

      31
    • (5) Digital Controller

      31
    • This section is the main processor and data acquisition section. It also provides host communicat...

      31
    • (6) Sensor Electronics

      31
    • This section detects RF samples and sends them to the microprocessor.

      31
• Specifications

  33
  • This chapter lists the specifications of the Apex generator in the following sections:

    33
  • In some cases, specifications for all Apex units are the same, but in other cases, the unit speci...

    33
  • Physical Specifications

    33
    • Table 3-1 describes the physical specifications of the Apex generator. In some cases, the specifi...

      33
    • Table 3-1. Physical Specifications

      34
    • Packaging

      34
    • A—frame mount (£ 5500 Watts)

      34
    • B—frame mount w/rack ears (1/2 rack) (rack ears on same end of the unit as the water connectors)

      34
    • C—integrated rack mount

      34
    • D—1/2 dual integrated rack mount (left)

      34
    • E—1/2 dual integrated rack mount (right)

      34
    • F—exclusive option #1

      34
    • G—exclusive option #2

      34
    • H—exclusive option #3

      34
    • J—exclusive option #3

      34
    • K—on-board frame mount, opposite end LEDs

      34
    • L—on-board frame mount, opposite end LEDs, with 4 handles

      34
    • M—on board frame mount, opposite end LEDs, with 2 handles

      34
    • N—frame mount with rack ears (1/2 rack) (opposite end from water connectors)

      34
    • Size

      34
    • 13.34 cm (H) x 21.6 cm (W) x 48.47 cm (D) 5.25² (H) x 8.5² (W) x 19.19² (D) See Figure 5-1 on pag...

      34
    • Weight

      34
    • 18.2 kg (40 lbs.)

      34
    • Clearance

      34
    • No special requirements

      34
    • AC power input connector

      35
    • A—ODU connector (see “ODU Connector” on page57)

      35
    • B—Non-terminated 3 m, 4-conductor, shielded pigtail (see “NonTerminated, four-Conductor Pigtail” ...

      35
    • C—Non-terminated 12¢, 4-conductor, pigtail (see “NonTerminated, four-Conductor Pigtail” on page58)

      35
    • D—Harting Type Han-Q (see “Harting Type Han-Q Connector” on page59)

      35
    • E—4-terminal, stud mount

      35
    • F—15´ 4-conductor, with a Hubbell CS8365C plug

      35
    • G—5´ Harting

      35
    • H—Term 3m, 4 cond, shielded pigtail Marinco 3015P

      35
    • J—5’ terminated, 4 conductor, SH with contact LS1 BF.F6 5+PE (30A)

      35
    • K—ODU connector with 20 degree rotation

      35
    • L—Harting Type Han-Q (16A) rotated 180 degrees

      35
    • M—6’,4 conductor with #10 ring lugs on each wire

      35
    • RF output connector

      35
    • 0—exclusive option #1

      35
    • 1—7/16 connector (see “Connecting Output Power” on page55)

      35
    • 2—SQS‘connector (see “Connecting Output Power” on page55)

      35
    • 3—LC connector (see “Connecting Output Power” on page55)

      35
    • 4—HN (see “Connecting Output Power” on page55)

      35
    • 5—N (see “Connecting Output Power” on page55)

      35
    • 6—exclusive option #2

      35
    • RF Connector location

      35
    • 0—opposite end from water connections

      35
    • 1—utilities end (near water connections)

      35
    • Water control connectors

      36
    • Switchcraft™ #L712A

      36
    • User port (analog I/O) connector

      36
    • A—no analog port

      36
    • B—25-pin APEX standard (see “25-Pin Apex Standard User Port” on page42)

      36
    • C—25-pin custom RFG compatible

      36
    • D—15-pin, exclusive option #2 (see “15-Pin User Port (Exclusive—Option D)” on page416)

      36
    • E—15-pin, exclusive option #3 (see “15-Pin User Port (Exclusive—Option E)” on page426)

      36
    • F—N/A

      36
    • G—exclusive option #4

      36
    • Host port (serial I/O) connector

      36
    • 0—9-pin, shielded, female, subminiature-D (see “Host Port—RS-232 With AE Bus” on page437)

      36
    • 1—9-pin, shielded, female, subminiature-D (Currently NOT available)

      36
    • 2—5-pin, male, Lumberg RSF 5/0.5 or Turck FS 4.5 (see “Host Port—DeviceNet” on page472)

      36
    • 3—9-pin, shielded, female, subminiature-D (see “Host Port—Profibus” on page458)

      36
    • 4—exclusive option #1

      36
    • 5—5-pin, male, Lumberg RSF 5/0.5 or Turck FS 4.5

      36
    • 6—9-pin, shielded, female, subminiature-D

      36
    • 7—exclusive option #2

      36
    • CEX connector

      36
    • Female LIMO#EPL.00.250.NTN

      36
    • Coolant connectors

      36
    • 0—3/8 BSP female

      36
    • 1—3/8 NPT adapters (adapters from 3/8 BSP female threads in the manifold)(increases unit length)

      36
    • 2—3/8 BSP to 1/2² NPT

      36
    • For information on connecting the water, see “Connecting Cooling Water” on page54.

      36
    • Panel

      37
    • 0—on-board frame mount

      37
    • 1—Integrated rack-mount with blank panel

      37
    • 2—Integrated rack-mount with passive digital display

      37
    • 3—Integrated rack-mount with active digital display

      37
    • 4—exclusive option #1

      37
    • RF measurement option

      37
    • 0—Coupler

      37
    • 1—V/I probe

      37
  • Electrical Specifications

    37
    • Table 3-2, Table 3-3, and Table 3-4 describe the input power, output power, and other electrical ...

      37
  • Input Power Specifications

    37
    • Table 3-2 describes the input power specifications for the Apex generator.

      37
    • Table 3-2. Input Power Specifications

      37
    • Line voltage

      37
    • 0—208 V nominal, 187 to 229 Vac, 3f

      37
    • 1—400 V nominal, 360 to 440 Vac, 3f

      37
    • 2—n/a

      37
    • 3—208 V nominal, 187 to 229 Vac, 3f

      37
    • 4—400 V nominal, 360 to 440 Vac, 3f

      37
    • Line frequency

      38
    • 47 to 63 Hz

      38
    • Line current

      38
    • Typical A/f and circuit breaker rating for units with 208Vac nominal input (PIN position 3, opti...

      38
    • Typical A/f and circuit breaker rating for units with 400Vac nominal input (PIN position 3, opti...

      38
  • Output Electrical Specifications

    38
    • Table 3-3 describes the output specifications for the Apex generator.

      38
    • Table 3-3. Output Specifications

      38
    • Regulation modes

      38
    • Output frequency

      38
    • 0—N/A

      38
    • 3—13.56 MHZ, ±0.005%

      38
    • Full-rated output power

      39
    • (Minimum into a 50 W, non- reactive load)

      39
    • A—1000 W

      39
    • B—1500 W

      39
    • C—2000 W

      39
    • D—3000 W

      39
    • E—4000 W

      39
    • F—5500 W

      39
    • J—5000 W

      39
    • K—1000 W high accuracy low output (HALO)

      39
    • L—1500 W HALO minimum into a 50 W, non-reactive load

      39
    • M—3500 W

      39
    • Output impedance

      39
    • A—50 W

      39
    • B—exclusive option #1

      39
    • C—exclusive option #2

      39
    • D—exclusive option #5

      39
    • E—exclusive option #6

      39
    • F—exclusive option #3

      39
    • G—exclusive option #4

      39
    • H—exclusive option #7

      39
    • J—exclusive option #8

      39
    • Delivered power into 2:1 VSWR loads

      39
    • B—1.5kW = 1125W

      39
    • D—3kW = 2000W

      39
    • F—5.5kW = 3350W

      39
    • Delivered power into 3:1 VSWR loads

      39
    • B—1.5kW = 650W

      39
    • D—3kW = 1200W

      39
    • F—5.5kW = 1900W

      39
    • Output protection—Apex generators sense and employ several parameters for protection

      40
      • Reflected power limit

        40
    • 20% of maximum forward power for units rated for less than 5500 W. 1000 W for 5500 W units. (PIN ...

      40
      • Dissipation limit

        40
    • Maximum PA dissipation—non-latching alarm LED

      40
      • Low/high line bus

        40
    • Bus voltage outside spec window—latching alarm LED

      40
      • Over-temperature

        40
    • Over-temp condition—latching alarm LED preceded by non-fault warning (user setting).

      40
      • Output power range

        40
    • All generators except the HALO will allow setpoints between 1% and 100% of full scale. The except...

      40
    • Output power regulation accuracy

      40
      • Into 50 W non-reactive load

        40
      • Into 3:1 VSWR non- reactive load

        40
    • ± 3% of setpoint (load power regulation), over all load phase angles, or ± 0.25% of full-rated ou...

      40
    • Load regulation as a function of line regulation

      40
    • Less than 0.1% change in output power for 10% change in ac line voltage

      40
    • Load regulation as a function of temperature—(performance in accordance with the output power reg...

      40
      • Ambient air temperature range

        40
    • +5°C to +40°C

      40
      • Cooling water temperature range

        40
    • +5°C to +35°C

      40
    • Spurious outputs—Referenced to fundamental signal at full-rated output when operated in a 50 W no...

      40
      • Harmonic related

        40
    • -40 dBc

      40
      • Non-harmonic related

        40
    • -50 dBc

      40
    • Warm up

      41
    • Approximately 2 s from ac-on to RF-on

      41
    • RF On Response time

      41
    • < 7 ms (6.4 ms typical)

      41
    • Turn-off/decay time

      41
    • 10 µs until output decays to 1% of maximum rated value.

      41
    • Power repeatability

      41
    • £ 0.5% over time for same generator for setpoints >500W. 1% generator to generator as measured ...

      41
    • Power cycles, standard options

      41
    • 6 million cycles, 0 to full power into a matched load

      41
    • 360 kilocycles, 0 to full power into high dissipation load

      41
    • Power Cycles with DC heating option

      41
    • 30 million cycles, 0 to full power into a matched load

      41
    • 5 million cycles, 0 to full power into high dissipation load

      41
  • Other Electrical Specifications

    41
    • Table 3-4 describes the other electrical specifications for the Apex generator.

      41
    • Table 3-4. Other Electrical Specifications

      41
    • Efficiency (line to load)

      41
    • 60%, typical @ full-rated power, nominal line

      41
    • Power factor

      41
    • > 0.96

      41
    • Maximum leakage current

      41
    • 3.5 mA

      41
    • Master - Slave / CEX (The Apex generator automatically locks the RF output signal phase to the co...

      41
      • Phase relationship (RF output inphase with the CEX input signal)

        41
    • 0° ± 5°

      41
      • CEX In

        42
      • CEX Out

        42
  • Cooling Specifications

    42
    • Table 3-5 describes the cooling specifications for the Apex generator.

      42
    • Table 3-5. Cooling Specification 

      42
    • Temperature

      42
    • +35°C (+95°F)

      42
    • Flow rate

      42
    • For £ 3kW 7.6 1pm (2 gpm) For > 3kW 11.4 1pm (3 gpm)

      42
    • Pressure

      42
      • Minimum pressure differential (supply to drain) required to achieve specified minimum flow rates)

        42
    • For £ 3kW 0.9 Bar (13psi) For > 3kW 2 Bar (29 psi)

      42
      • Maximum pressure rating

        43
    • 6.9 Bar (100 psi)

      43
    • Heat removal

      43
    • Contaminates

      43
    • The following specifications are recommended for the water used to cool the Apex generator:

      43
  • Graphical Representations of Flow Rate

    44
    • The following graph shows how flow (gpm) lessens as the pressure (psi) drops.

      44
      • Figure 3-1. Flow Rate vs. Pressure Drop

        44
    • The following graph shows how Water Flow vs. Inlet Temp for all three Apex Units. It represents t...

      45
      • Figure 3-2. Water flow vs. Inlet Temperature

        45
  • Environmental Specifications

    46
    • Table 3-6 and Table 3-7 provide climatic and other environmental specifications for the Apex gene...

      46
    • Table 3-6. Climatic Specifications

      46
    • Class 3K3

      46
    • 5C to +40C

      46
    • +41F to +104F

      46
    • Class 3K2

      46
    • 10% to 85% 1

      46
    • +2 g/m3 to +25 g/m3

      46
    • Class 3K3

      46
    • 80 kPa to 106 kPa

      46
    • 800 mbar to 1060 mbar (approximately 2000 m above sea level)

      46
    • Class 1K4

      46
    • -25C to +55C

      46
    • -13F to +131F

      46
    • Class 1K3

      46
    • 5% to 95%

      46
    • +1 g/m3 to +29 g/m3

      46
    • Class 1K4

      46
    • 80 kPa to 106 kPa

      46
    • 800 mbar to 1060 mbar (approximately 2000 m above sea level)

      46
    • Class 2K3

      46
    • -25C to +70C

      46
    • -13F to +158F

      46
    • Class 2K3

      46
    • 95%2

      46
    • +60 g/m3 3

      46
    • Class 2K3

      46
    • 66 kPa to 106 kPa

      46
    • 660 mbar to 1060 mbar (approximately 3265 m above sea level)

      46
    • Table 3-7 shows other environmental specifications for the Apex generator.

      46
    • Table 3-7. Environmental Specifications

      46
    • Overvoltage

      46
    • Category II

      46
    • Pollution Degree

      46
    • 2

      46
• Interfaces and Indicators

  47
  • This chapter contains information on the Apex communication interfaces and status indicators (LED...

    47
  • Not all of these sections apply to any one Apex unit. To identify the sections that apply to your...

    47
  • Apex User Port Options

    48
    • The following sections provide information for each of the User port options available with the 1...

      48
    • Not all of these sections apply to any one Apex unit. To identify the section that applies to you...

      48
  • 25-Pin Apex Standard User Port

    48
    • The following section describes the Apex standard 25-pin User port. To determine if your Apex uni...

      48
      • This section of the manual provides information for the: Apex standard 25-pin User port option PI...

        48
    • This User port is the standard option.

      48
    • The User port uses a 25-pin, shielded, female, subminiature-D connector.

      48
      • Figure 4-1. User Port connector 25 Pin APEX Standard

        48
    • Unless otherwise specified, all analog signals are 0 to 10 V while all digital signals are 5 to 2...

      49
    • Ground/Return lines are floating and need to be connected as close to the system as possible.

      49
    • Satisfying Minimal Requirements for the 25-Pin User Port

      49
      • Regardless of whether you are controlling and monitoring the generator through the User port or t...

        49
      • If you are not using the User port to control or monitor the unit, you can use a “dummy” or “chea...

        49
      • If desired, you can add an emergency off switch in series with the RF PWR ON signal (pin 4) or ti...

        49
    • Interface Cabling Requirements for 25-pin user port

      49
      • The cable used to connect the Apex generator’s User port to the system controller must be a shiel...

        49
    • Pin Descriptions for the 25-Pin User Port

      49
      • Table 4-1 provides the connector pin descriptions for this User port interface. The pin numbers a...

        49
      • Table 4-1. User Port 25-Pin APEX Standard Pin Descriptions

        50
    • 1

      50
    • Digital Output

      50
      • See signal pin 14

        50
    • 2

      50
    • 15

      50
    • Analog output

      50
      • This signal provides a linearly scaled read back of reflected power.

        50
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position ...

        50
      • See Wiring Diagram 4-2.

        50
      • Pin 15 must be grounded.

        50
    • 3

      50
    • 16

      50
    • Analog output

      50
      • This signal provides a linearly scaled read back of forward power when the generator is operated ...

        50
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN position 2 in Table 1-1.

        50
      • See Wiring Diagram 4-1. for wiring diagram.

        50
      • Pin 16 must be grounded

        50
    • 4

      51
    • 17

      51
    • Digital input

      51
      • When a positive voltage between 4 and 30 V is applied to this pin RF output is enabled. Once the ...

        51
      • See Wiring Diagram 4-5.

        51
    • 5

      51
    • 18

      51
    • Analog input

      51
      • This pin linearly controls the RF output of the generator.

        51
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN position 2 in Table 1-1.

        51
      • See Wiring Diagram 4-3.

        51
    • 6

      52
    • 19

      52
    • Digital input

      52
      • This pin is used in conjunction with signal pin 7 to allow the generator to regulate its power ba...

        52
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN position 2 in Table 1-1.

        52
      • See Wiring Diagram 4-6.

        52
    • 7

      53
    • 20

      53
    • Analog input

      53
      • This pin is used in conjunction with signal pin 6 to allow the generator to regulate its power ba...

        53
      • See Wiring Diagram 4-4.

        53
    • 8

      53
    • 21

      53
    • Digital input

      53
      • Applying a positive dc voltage between 4 and 30 V to this pin causes the generator to regulate on...

        53
      • See Wiring Diagram 4-7.

        53
    • 9

      53
    • Digital Output

      53
      • See Signal pin 22

        53
    • 10

      53
    • 23

      53
      • This pin when connected externally to pin 23 closes the interlock and allows the RF output to be ...

        53
      • See Wiring Diagram 4-12.

        53
    • 11

      54
    • Digital Output

      54
      • See Signal Pin 24

        54
    • 12

      54
    • 25

      54
    • Digital output

      54
      • When the generator is successfully phase-locked to an external oscillator, a low (opto- coupler o...

        54
      • See Wiring Diagram 4-11.

        54
    • 13

      54
    • 21

      54
    • Analog output

      54
      • This pin, referenced to ground, provides a +15 Vdc auxiliary supply for external use.

        54
      • See Wiring Diagram 4-13.

        54
    • 14

      54
    • 1

      54
    • Digital output

      54
      • When the output is equal to the requested setpoint, a low (opto- coupler output) impedance is cre...

        54
      • See Wiring Diagram 4-8.

        54
    • 15

      54
    • Analog output

      54
      • See pin 2

        54
    • 16

      54
    • Analog output

      54
      • See pin 3

        54
    • 17

      54
    • Digital input

      54
      • See pin 4

        54
    • 18

      54
    • Analog input

      54
      • See pin 5

        54
    • 19

      54
    • Chassis ground

      54
      • This pin represents DC ground connection common to chassis ground.

        54
    • 20

      54
    • Analog input

      54
      • See pin 7

        54
    • 21

      54
    • Chassis ground

      54
      • Chassis ground connection common to dc ground

        54
    • 22

      55
    • 9

      55
    • Digital output

      55
      • When an internal overtemperature shutdown condition is detected, a low (opto-coupler output) impe...

        55
      • See Wiring Diagram 4-9.

        55
    • 23

      55
    • 10

      55
      • See Pin 10.

        55
    • 24

      55
    • 11

      55
    • Digital output

      55
      • When the interlocks are satisfied and the AC input voltage is within its specification, a low (op...

        55
      • See Wiring Diagram 4-10.

        55
    • 25

      55
    • Digital Output

      55
      • See pin 12

        55
      • Wiring Diagrams for the Standard 25-Pin User Port

        55
        • The diagrams in this section provide wiring information to properly connect to the Apex standard ...

          55
  • 15-Pin User Port (Exclusive—Option D)

    62
    • To determine if your Apex unit has this interface, use the configuration PIN from your Apex unit ...

      62
      • This section of the manual provides information for the: Apex 15-pin User port, option D PIN posi...

        62
    • This 15-pin User port option offers only basic control and monitoring capability.

      62
    • The User port uses a 15-pin, shielded, female, subminiature-D connector.

      62
      • Figure 4-2. User port connector 15 Pin Exclusive for configuration D

        63
    • Satisfying Minimal Requirements for Option D 15-Pin User Port

      63
      • Regardless of whether you are controlling and monitoring the generator through the User port or t...

        63
      • If you are not using the User port to control or monitor the unit, you can use a “dummy” or “chea...

        63
      • If desired, you can add an emergency off switch in series with the RF POWER ENABLE signal (pins 4...

        63
    • Interface Cabling Requirements for Option D user port

      63
      • The cable used to connect the Apex generator’s User port to the system controller must be a shiel...

        63
      • Unless otherwise specified, all analog signals are 0 to 10V while all digital signals are 0 to 5V.

        64
    • Pin Descriptions for Option D User Port

      64
      • Table 4-2 provides the connector pin descriptions for the User port interface.

        64
      • Table 4-2. User Port (15-pin) Connector Pins Exclusive for Configuration D 

        64
    • 1

      64
    • 6

      64
      • POWER LIMIT STATUS

        64
    • Digital output

      64
      • When a +5 V signal is present at this pin a power limit is encountered; signal low represents nor...

        64
      • See Wiring Diagram 4-19.

        64
    • 2

      64
    • 6

      64
      • REFLECTED POWER MONITOR

        64
    • Analog output

      64
      • This analog signal provides a linearly scaled readback of the reflected power (1 V per 1 kW refle...

        64
      • See Wiring Diagram 4-15.

        64
    • 3

      64
    • 6

      64
      • FORWARD/LOAD POWER MONITOR

        64
    • Analog output

      64
      • This analog signal provides a linearly scaled readback of the forward power (when the generator i...

        64
      • See Wiring Diagram 4-14.

        64
    • 4

      65
    • 6

      65
      • RF POWER ENABLE

        65
    • Digital input

      65
      • RF output is enabled when a 4 to 30 V input (pin 9, RF ON BIAS, can be used as a voltage source) ...

        65
      • See Wiring Diagram 4-17.

        65
    • 5

      65
    • 6

      65
      • FORWARD/LOAD POWER SETPOINT

        65
    • Analog input

      65
      • This analog signal provides a linearly scaled control of the forward or load output power dependi...

        65
      • See Wiring Diagram 4-16.

        65
    • 6

      65
      • SIGNAL COMMON

        65
    • Chassis ground

      65
      • This pin is Signal Common. Also connected to Apex generator chassis ground.

        65
    • 7

      65
    • 6

      65
      • RF ON STATUS

        65
    • Digital output

      65
      • + 5 Vdc on this pin represents RF ON.

        65
      • See Wiring Diagram 4-18.

        65
    • 8

      65
    • 6

      65
      • EXTERNAL BIAS

        65
    • Voltage reference

      65
      • +15 Vdc provided to the User port through a 5.62 kW resistor.

        65
      • See Wiring Diagram 4-20.

        65
    • 9

      66
    • 6

      66
      • RF ON BIAS

        66
    • Voltage reference

      66
      • +15 Vdc provided to the User port through a 1.1 kW resistor. It can be used for a switch or relay...

        66
      • See Wiring Diagram 4-21.

        66
    • 10

      66
      • UNASSIGNED

        66
    • 11

      66
    • 6

      66
      • INTERLOCK

        66
    • Analog Input

      66
      • When connected together, these pins close the interlock and allows RF output to be enabled.

        66
      • See Wiring Diagram 4-23.

        66
    • 12

      66
    • 6

      66
      • RESERVED for PULSING ENABLE

        66
    • Digital Input

      66
      • This pin is currently reserved for future use.

        66
    • 13

      66
    • 6

      66
      • FWD/LOAD POWER REGULATION

        66
    • Digital Input

      66
      • Load Power Regulation is enabled when a 4 to 30V input is present on this pin.

        66
      • See Wiring Diagram 4-22.

        66
    • 14

      66
      • UNASSIGNED

        66
    • 15

      66
      • UNASSIGNED

        66
      • Wiring Diagrams for Option D 15-Pin User Port

        66
        • The diagrams in this section provide wiring information to properly connect to the Apex 15-pin co...

          66
  • 15-Pin User Port (Exclusive—Option E)

    72
    • The following section describes the Apex 15-pin User port (configuration E). To determine if your...

      72
      • This section of the manual provides information for the: Apex 15-pin User port (configuration E) ...

        72
      • Figure 4-3. User Port connector 15 pin exclusive for Configuration E

        72
    • This 15-pin User port option offers only basic control and monitoring capability.

      72
    • The User port uses a 15-pin, shielded, female, subminiature-D connector.

      72
    • Unless otherwise specified, all analog signals are 0 to 10 V, while all digital signals are 0 to ...

      72
    • Satisfying Minimal Requirements for Option E 15-Pin User Port

      73
      • Regardless of whether you are controlling and monitoring the generator through the User port or t...

        73
      • If you are not using the User port to control or monitor the unit, you can use a “dummy” or “chea...

        73
      • If desired, you can add an emergency off switch in series with the RF POWER ENABLE signal (pins 4...

        73
    • Interface Cabling Requirements for Option E user port

      73
      • The cable used to connect the Apex generator’s User port to the system controller must be a shiel...

        73
    • Pin Description for Option E User Port

      73
      • Table 4-3 provides the connector pin information for the User port interface.

        73
      • Table 4-3. User Port (15-pin) Connector Pins Exclusive for Configuration E

        74
    • 1

      74
    • +24V (User Provided)

      74
    • Voltage Input

      74
      • +24V provided by user for devicenet LEDs, used for DeviceNet isolation.

        74
      • See Wiring Diagram 4-24.

        74
    • 2

      74
    • 6

      74
    • REFLECTED POWER MONITOR

      74
    • Analog output

      74
      • This analog signal provides a linearly scaled readback of reflected power.

        74
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position ...

        74
      • See Wiring Diagram 4-25.

        74
    • 3

      74
    • 6

      74
    • FORWARD / LOAD POWER MONITOR

      74
    • Analog output

      74
      • This analog signal provides a linearly scaled readback of the forward power (when the generator i...

        74
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position ...

        74
      • See Wiring Diagram 4-26.

        74
    • 4

      75
    • RF POWER ENABLE

      75
    • Digital input

      75
      • This pin represents RF output being enabled when a 4 to 30V input (pin 9, RF ON BIAS, can be used...

        75
      • See Wiring Diagram 4-27.

        75
    • 5

      75
    • 6

      75
    • FORWARD / LOAD POWER SETPOINT

      75
    • Analog input

      75
      • This analog signal provides a linearly scaled control of the forward or load output power dependi...

        75
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position 2.

        75
      • See Wiring Diagram 4-28.

        75
    • 6

      76
    • SIGNAL COMMON

      76
    • Chassis ground

      76
      • Common for signal pins 2, 3, and 5. Connected to the Apex generator chassis ground.

        76
    • 7

      76
    • 8

      76
    • RF ON STATUS

      76
    • Digital output

      76
      • When an RF ON STATUS condition is detected, a low (opto- coupler output) impedance is created bet...

        76
      • See Wiring Diagram 4-29.

        76
    • 8

      76
    • RF ON STATUS RETURN

      76
    • Digital output

      76
      • See pin 7

        76
    • 9

      76
    • +15 Vdc

      76
    • Voltage reference

      76
      • +15 Vdc provided to the User port through a 1.1kW resistor. Can be used for a switch or relay con...

        76
      • See Wiring Diagram 4-30.

        76
    • 10

      76
    • MODULE STATUS LED OUTPUT (GREEN)

      76
    • Digital output

      76
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...

        76
      • See Wiring Diagram 4-24.

        76
    • 11

      77
    • 12

      77
    • INTERLOCK

      77
      • When connected externally, these pins close the interlock and allows RF output to be enabled.

        77
      • See Wiring Diagram 4-31.

        77
    • 12

      77
    • INERLOCK RETURN

      77
      • See pin 11

        77
    • 13

      77
    • NETWORK STATUS LED OUTPUT (GREEN)

      77
    • Digital output

      77
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...

        77
      • See Wiring Diagram 4-24.

        77
    • 14

      78
    • MODULE STATUS LED OUTPUT (AMBER)

      78
    • Digital output

      78
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...

        78
      • See Wiring Diagram 4-24.

        78
    • 15

      78
    • NETWORK STATUS LED OUTPUT (AMBER)

      78
    • Digital output

      78
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...

        78
      • See Wiring Diagram 4-24.

        78
      • Wiring Diagrams for Option E User Port

        78
        • The diagrams in this section provide wiring information to properly connect to the Apex 15-pin Us...

          78
  • Apex Host Port Options

    83
    • The following sections provide information for each of the Host port options available with the 1...

      83
    • Not all of these sections apply to any one Apex unit. To identify the section or sections that ap...

      83
  • Host Port—RS-232 With AE Bus

    83
    • This section describes the RS-232, AE Bus Host port interface, which is the standard Apex option....

      83
      • This section of the manual provides information for the: RS-232, AE Bus Host port option PIN posi...

        83
    • This Apex Host port, which is the standard, or default option, uses an RS-232 signal format and A...

      83
    • AE manufactures an interface software, Virtual Front Panel, which allows you to use a computer to...

      83
    • The RS-232, AE Bus Host port is a 9-pin, female, shielded, subminiature-D connector.

      84
      • Figure 4-4. RS-232, AE Bus Host port connector

        84
    • The signals available at the RS-232, AE Bus Host port conform to the RS-232 interface standards. ...

      84
    • To Connect the Computer to the Apex unit:

      84
    • Use a standard RS-232 cable that is no longer than 50 feet in length. This cable has a 9-pin, shi...

      84
    • Table 4-4. RS-232, AE Bus Host Port Pin Descriptions

      85
    • 1

      85
      • Reserved for future use

        85
    • 2

      85
      • RS-232 transmit data

        85
    • 3

      85
      • RS-232 receive data

        85
    • 4

      85
      • Reserved for future use

        85
    • 5

      85
      • Data Common

        85
    • 6

      85
      • Reserved for future use

        85
    • 7

      85
      • Reserved for future use

        85
    • 8

      85
      • Reserved for future use

        85
    • 9

      85
      • Reserved for future use

        85
      • RS-232, AE Bus Host Port Cabling Requirements

        85
        • The cabling requirements for the RS-232 and AE Bus requires a standard DB-9 male to female extens...

          85
      • Communicating Through the RS-232, AE Bus Host Port

        85
        • The communications capability of the serial AE Bus Host port is limited to the following parameters:

          85
        • The time-out period for the Apex generator is factory set at 0.02 s (that is, no more than 0.02 s...

          85
        • The host computer must finish one transaction with the Apex generator before it initiates another...

          86
      • AE Bus Protocol

        86
        • The AE Bus protocol uses pure binary data (nothing is coded in ASCII) and is designed to facilita...

          86
        • The AE Bus message packet combines chunks of information in such a way that groups of information...

          86
        • Figure 4-5. shows the organization of these data fields in the AE Bus message packet. The subsequ...

          86
          • Figure 4-5. Graphic representation of a RS-232, AE Bus message packet

            86
      • Header

        87
        • The first byte in each packet contains two pieces of information: five bits contain the packet ad...

          87
        • The remaining three bits (bits 0, 1, and 2) tell the receiving unit how long the Data field is so...

          87
      • Command

        87
        • This field contains a one-byte value: 00h to FFh (0 to 255). If the message packet originates wit...

          87
      • Optional Length Byte

        87
        • This field supplements the Header field and exists only when the length bits in the Header field ...

          87
      • Data (Data Bytes)

        87
        • The Data field can contain from 0 to 255 bytes of binary data, which are interpreted in various w...

          87
        • If the value specified in the length bits of the Header field is 0 to 6, the Apex generator expec...

          87
      • Checksum

        88
        • This one-byte field is the last one in the packet. The content depends on the value of each of th...

          88
        • Only after the checksum of a message packet is validated (having no parity errors, and the addres...

          88
      • Creating an Ideal Communications Transaction

        88
        • Figure 4-6. is a simplified graphic showing the steps in an ideal communications transaction betw...

          88
        • Host

          88
          • Figure 4-6. AE Bus communications transaction

            88
        • First, the host computer sends a message packet to the Apex generator. The packet contains one of...

          88
        • Once the Apex generator receives the message packet, the Apex generator verifies that the message...

          89
        • If the address does not match, the Apex generator does not respond to the host; the Apex generato...

          89
        • If the Apex generator receives a request for data or status information, it gathers and sends the...

          89
        • If the host receives a NAK from the Apex generator, the host either retransmits the packet or doe...

          89
        • Meanwhile, the Apex generator has prepared a message packet with the requested information or app...

          89
        • If the Apex generator receives an ACK, it returns to the normal waiting state. If the Apex genera...

          89
      • Host/Apex Communications Transaction Example

        89
        • Figure 4-7 is a simplified graphic showing the steps in an example communications transaction bet...

          89
          • Figure 4-7. AE Bus communications transaction example

            90
      • Command Status Response (CSR) Codes—RS-232, AE Bus Host

        90
        • When the host sends an executable command or a command requesting a change in a parameter setting...

          90
        • Table 4-5. CSR Codes for RS-232, AE Bus Host

          90
    • 0

      90
      • Command accepted

        90
    • 1

      90
      • Wrong control mode

        90
    • 2

      90
      • Output is on

        90
    • 3

      90
      • Output is off

        90
    • 4

      90
      • Data is out of range

        90
    • 5

      90
      • User off active

        90
    • 7

      90
      • Active fault(s) exist

        90
    • 9

      90
      • Data byte count is incorrect

        90
    • 14

      90
      • CMD not accept

        90
    • 16

      90
      • T life

        90
    • 19

      90
      • Recipe active

        90
    • 30

      90
      • EPROM read/write

        90
    • 50

      90
      • Frequency out of range

        90
    • 51

      91
      • Duty cycle out of range

        91
    • 52

      91
      • Minimum on/off time violated (on/off time must be ³ 10µs).

        91
    • 99

      91
      • Command not implemented

        91
      • Command Set for the RS-232, AE Bus Host Port

        91
        • Table 4-6 lists the command set for the RS-232, AE Bus Host port.

          91
        • Table 4-6. Host Port Commands for RS-232 with AE Bus 

          91
        • Requests RF output off; request is always honored regardless of which interface has control. (Rea...

          91
    • 0

      91
    • 1

      91
      • Requests RF output on; host control must have been selected.

        91
    • 0

      91
    • 1

      91
      • Sets the method of output regulation (forward power (6), load (7), and ext. (8)). (Readback comma...

        91
    • 1 data byte 8-bit value

      91
    • 1

      91
      • Specifies maximum forward power that can be delivered; accepts a value of 0 to 8000 W (for the 8 ...

        91
    • 2 data bytes 16-bit value

      91
    • 1

      91
      • Specifies maximum reflected power that can be tolerated; accepts a value of 0 to 2000 W. (Readbac...

        91
    • 2 data bytes 16-bit value

      91
    • 1

      91
      • Specifies the maximum external feedback level; accepts a value from 0 to the maximum external fee...

        91
    • 2 data bytes 16-bit value

      91
    • 1

      91
      • Specifies the output setpoint level for whatever method of output regulation has been selected. A...

        92
    • 2 data bytes 16-bit value

      92
    • 1

      92
      • Specifies the external feedback value that corresponds to 10 V on the User port; requires data by...

        92
    • 3 data bytes 16-bit value 8-bit value

      92
      • Specifies which target is active; accepts a value of 1 to 4. (Readback command is 156.)

        92
    • 1 data byte 8-bit value

      92
    • 1

      92
      • Sets the life (in kWh) of the target you specify. Requires five data bytes arranged as follows:

        92
      • (Readback command is 157.)

        92
    • 5 data bytes 8-bit value 32-bit value

      92
    • 1

      92
      • Sets the active control mode of the generator; possible choices are: 2 = host, 4 = User port (ana...

        92
    • 1 data byte 8-bit value

      92
    • 1

      92
      • Specifies how long the generator can produce output that is not equal to the programmed setpoint ...

        92
    • 2 data bytes 16-bit value

      92
    • 1

      92
      • Specifies a percentage that the generator can be out of setpoint before it starts the out-of- set...

        93
    • 1 data byte 8-bit value

      93
    • 1

      93
      • Specifies the number of recipe steps. Send 1 data byte that indicates the number of recipe steps ...

        93
    • 1 data byte 8-bit value

      93
      • Specifies setpoint for a recipe step. Send 3 data bytes.

        93
      • • byte 1 = recipe step number (can be 1 through 7)

        93
      • • bytes 2 and 3 = setpoint value (send least significant byte first); the value must be within th...

        93
    • 3 data bytes 8-bit value 16-bit value

      93
      • Sets the run time for the specified recipe step. Send 3 data bytes.

        93
      • • byte 1 = recipe step number (1 through 7)

        93
      • • bytes 2 and 3 = run time in hundredths of seconds or in joules (if the recipe is set for joules...

        93
    • 3 data bytes 8-bit value 16-bit value

      93
      • Sets the recipe for time or joules mode. Send one data byte indicating the recipe type:

        93
    • 1 data byte 8-bit value

      93
      • Sets the Host port timeout value. Accepts a value of 2 to 500, representing 0.02 to 5.0 s. (Readb...

        93
    • 2 data bytes 16-bit value

      93
    • 1

      93
      • Sets the serial port address and baud rate. Send 3 data bytes:

        94
      • • byte 1:

        94
        • bits 0 through 4 set serial port address (addresses 1 through 31 are supported)

          94
        • bits 5 and 6 are unused

          94
        • bit 7 selects communication protocol (0=RS-232, 1=RS-485)

          94
      • • Bytes 2 and 3 = baud rate (send least significant byte first)

        94
        • Valid baud rates depend on the communication protocol selected in byte 1:

          94
        • For RS-232, send 1200, 4800, 9600, or 19200

          94
        • For RS-485, send 9600, 19200, 38400, or 57600

          94
        • Read back with CMD 212.

          94
    • 3 data bytes 8-bit value 16-bit value

      94
      • Sets the pin diode 1 latch. Send 1 data byte.

        95
      • • byte 1 = latch

        95
    • 1 data byte 8-bit value

      95
      • Sets the RF pulsing frequency in Hz. Accepts a value of 150 to 50000. Read back with command 193.

        95
    • 4 data bytes 32-bit value

      95
    • 1

      95
      • Sets the RF pulsing duty ON time in increments of 1%. This value can range from 10% to 90%. Minim...

        95
    • 2 data bytes

      95
      • Clears profibus fault and error code register

        95
      • Requests the generator type; returns 4 ASCII characters.

        95
    • 0

      95
    • 4 data bytes 4 ASCII characters

      95
      • Requests the output capacity of the generator; returning packet contains 4 ASCII characters.

        95
    • 0

      95
    • 4 data bytes 4 ASCII characters

      95
      • Requests the version number of the mainframe software. The returning packet contains 7 ASCII char...

        96
    • 0

      96
    • 7 data bytes 7 ASCII characters

      96
      • Requests the serial Host port time-out value (002 to 500 representing 0.02 to 5.00 s).

        96
    • 0

      96
    • 2 data bytes 16-bit value

      96
      • Requests regulation mode (set with CMD 3). Returning values:

        96
      • • 6 = Forward

        96
      • • 7 = Delivered or Load

        96
      • • 8 = External (DC Bias)

        96
    • 1 data byte 8-bit value

      96
      • Requests control mode (set by CMD 14). Returning values: 2 = host, 4 = analog

        96
    • 0

      96
    • 1 data byte 8-bit value

      96
      • Requests the number of the active target (set by CMD 11)

        96
    • 0

      96
    • 1 data byte 8-bit value

      96
      • Requests the amount of life remaining in the target you specify (set by CMD 12). This command req...

        96
    • 1 data byte 8-bit value

      96
    • 4 data bytes 32-bit value

      96
      • Requests report on process status; returning packet contains the following bytes arranged as foll...

        97
      • 1st status byte:

        97
      • 2nd status byte:

        97
      • 3rd status byte—fault flags

        97
      • 4th status byte—fault flags

        97
    • 0

      97
    • 4 data bytes 4—8-bit values

      97
      • Requests output setpoint level (set by CMD 8) and whatever method of output regulation has been s...

        98
    • 0

      98
    • 3 data bytes 16-bit value 8-bit value

      98
      • Requests a snapshot of forward power level at that instant. Regular units report in units of watt...

        98
    • 0

      98
    • 2 data bytes 16-bit value

      98
      • Requests a snapshot of reflected power level at that instant. Regular units report in units of wa...

        98
    • 0

      98
    • 2 data bytes 16-bit value

      98
      • Requests a snapshot of load power level at that instant

        98
    • 0

      98
    • 2 data bytes 16-bit value

      98
      • Requests a snapshot of external feedback level at that instant. Data bytes 1 and 2 represent Exte...

        98
    • 0

      98
    • 2 data bytes 16-bit value

      98
      • Requests programmed limit for forward power (set by CMD 4).

        98
    • 2 data bytes 16-bit value

      98
      • Requests reflected power limit (set by CMD5).

        98
    • 2 data bytes 16-bit value

      98
      • Requests external feedback limit (set by CMD6)

        99
    • 2 data bytes 16-bit value

      99
      • Reports dissipated power

        99
    • 2 data bytes 16-bit value

      99
      • Requests how long the generator is programmed to produce output that is not equal to the programm...

        99
    • 2 data bytes 16-bit value

      99
      • Requests what percentage the generator can be out of setpoint before it starts the out-of- setpoi...

        99
      • Reports the allowable setpoint deviation

        99
    • 1 data byte 8-bit value

      99
      • Reports the setpoints and run times for each recipe step. The number of data bytes returned depen...

        100
    • Varies; sends 4 data bytes for each recipe step

      100
      • Reports the number of steps in the recipe, the status of the most recent recipe run, and the reci...

        100
      • • Byte 1 = number of recipe steps

        100
      • • Byte 2 = recipe status:

        100
      • • Byte 3 = recipe mode (1 = time, 2 = joule)

        100
        • Requests the RF pulsing frequency in Hz (set with CMD 93).

          100
    • 4 data bytes 32-bit value

      100
      • Requests the duty cycle in% ON time

        100
    • 2 data bytes 16-bit value

      100
      • Requests the revision level of the mainframe software. The returning packet contains three ASCII ...

        100
    • 3 data bytes 3 ASCII characters

      100
      • Reports a count of unit on events

        101
    • 4 data bytes 32-bit value

      101
      • Reports a count of output on events

        101
    • 4 data bytes 32-bit value

      101
      • Reports a count of overtemp events

        101
    • 4 bytes 32 bit value

      101
      • Requests the amount of time (in seconds) that the generator was producing output.

        101
    • 4 data bytes 32-bit value

      101
      • Requests the total amount of energy (in kWh) delivered by the generator.

        101
    • 4 data bytes 32-bit value

      101
      • Returns faults, warnings, and shutdowns

        101
    • 1 data byte 8-bit value

      101
      • Returns the serial port 0 address and baud rate (set with CMD 69).

        102
      • • byte 1:

        102
        • bits 0 through 4 = serial port address (addresses 1 through 31 are supported)

          102
        • bits 5 and 6 = unused

          102
        • bit 7 = communication protocol (0=RS-232, 1=RS-485)

          102
      • • Bytes 2 and 3 = baud rate

        102
    • 3 data bytes 8-bit value 16-bit value

      102
      • Returns the condensed snapshot of generator data

        103
      • • 0,1: Forward Power with Bias Correction

        103
      • • 2,3: Reflected Power with Bias Correction

        103
      • • 4,5: Delivered Power with Bias Correction

        103
      • • 6,7 User Setpoint

        103
      • • 8: Regulation Mode (see command 3 for definition)

        103
      • • 9 to 12: Process Status (see command 162 for definition)

        103
      • • 13,14: Cold Plate Temperature (see command 228 for definition)

        103
      • • 15,16: DC Voltage

        103
      • • 17,18: DC current

        103
      • • 19 to 22: Unused

        103
        • APEX with VI Measurement data point definitions:

          103
      • • 0,1: Real Power with Bias Correction

        103
      • • 2,3: Imaginary Power with Bias Correction’

        103
      • • 4,5:VSQ with Bias Correction

        103
      • • 6,7: User Setpoint

        103
      • • 8: Regulation Mode (see command 3 for definition)

        103
      • • 9 to 12: Process Status (see command 162 for definition)

        103
      • • 13,14: Cold Plate Temperature (see command 228 for definition)

        103
      • • 15,16: DC Voltage

        103
      • • 17,18: DC Current

        103
      • • 19,20: Real Impedance

        104
      • • 21,22: Imaginary Impedance

        104
        • Returns a string that represents the AE product identification number (PIN). The actual PIN lengt...

          104
        • Retrieves the error code

          104
    • 1 data byte 8-bit value

      104
  • Host Port—Profibus

    104
    • This section describes the Profibus Host port interface. To determine if your Apex unit has this ...

      104
      • This section of the manual provides information for the: Profibus Host port option PIN position 6...

        104
    • AE Profibus Protocol

      105
      • Profibus (Process Field Bus) is an interface that lets you communicate with your Apex generator f...

        105
      • The Profibus Host port on the generator is a 9-pin, female, subminiature-D connector and an eight...

        105
        • Figure 4-8. Host port connector with Profibus

          105
      • Table 4-7 describes the Profibus Host port pins.

        105
      • Table 4-7. Profibus Host Port Pins

        105
    • 1

      105
    • UNASSIGNED

      105
    • 2

      105
    • UNASSIGNED

      105
    • 3

      105
    • A

      105
      • Data bus A

        105
    • 4

      106
    • UNASSIGNED

      106
    • 5

      106
    • ISOLATED GND

      106
      • Isolated ground

        106
    • 6

      106
    • ISOLATED +5 V

      106
      • Isolated +5 V

        106
    • 7

      106
    • UNASSIGNED

      106
    • 8

      106
    • B

      106
      • Data bus B

        106
    • 9

      106
    • UNASSIGNED

      106
      • Profibus Type Files (GSD Files)

        106
        • Type files are computer files that some Programmable Logic Controllers (PLCs) use to compile thei...

          106
        • For older Siemens Profibus PLCs, the “type file” is proprietary to Siemens Energy & Automation (S...

          106
        • Type files are available on SE&A’s electronic Bulletin Board Services (BBS). You can download the...

          106
        • You can download type files from a World Wide Web site maintained by the Profibus Trade Organizat...

          106
      • Setting the Network Address with the Profibus DIP Switch

        106
        • Use the DIP switch next to the Profibus port on the rear panel to set the Apex generator's addres...

          106
        • To enter the unit's address, set the switch positions for binary representation, starting with th...

          106
        • Placing a switch in the “up” position (toward the number) is the same as indicating “1” binary. T...

          107
      • Profibus Termination

        107
        • Please ensure that you follow proper termination procedures if your Apex is the last slave on the...

          107
      • Profibus Baud Rate

        107
        • The auto-baud feature of AE’s certified Profibus interface adjusts automatically to the rate of t...

          107
      • Profibus Master Reset Command

        107
        • Send the master reset command, Command 119, when the Apex supply has experienced a non-recoverabl...

          107
      • Profibus Watch Dog Timer

        107
        • As a safety feature, the Profibus maintains a watch dog timer that shuts off the Apex supply’s ou...

          107
        • If your Profibus system does not calculate the watch dog timer value for you or if you want to mo...

          107
      • Profibus-Specific Errors

        108
        • In the event of a Profibus error, the Apex generator turns output power off and sets the Profibus...

          108
      • Profibus Data Consistency

        108
        • Some PLCs using Profibus interfaces have a problem with data consistency. (We define “data consis...

          108
        • The root of the problem is a shared memory block. Most PLCs share a memory block with the Profibu...

          108
        • You can create a “work around” to this problem with a command sequence. (For more information abo...

          108
          • 1. Send the null command (Command 0). The Apex generator ignores this command.

            108
          • 2. Update the download packet with data for the desired command.

            108
          • 3. Update the packet with the desired command.

            108
          • 4. Send the download packet.

            108
          • 5. Repeat step 1, and continue as needed.

            108
        • By creating a procedure like this one, you can ensure the data for a command will not be changed ...

          108
      • Profibus/Apex Software Commands

        109
        • The new AE Profibus is command-based. We define a download packet (“outbytes”) and an upload pack...

          109
      • Profibus Download Packet

        109
        • The download packet for the AE Profibus contains four bytes, as the following table shows.

          109
        • Table 4-8. Configuration of Download Bytes (Outbytes)

          109
    • 0

      109
      • Command

        109
    • 1

      109
      • Data byte (LSB)

        109
    • 2

      109
      • Data byte

        109
    • 3

      109
      • Data byte (MSB)

        109
      • In the packet, bytes 1, 2, and 3 comprise the “data field” and contain information defined by the...

        109
      • Profibus Upload Packet

        109
        • During every Profibus data exchange, the Apex generator supplies a 14-byte response to a download...

          109
        • Table 4-9. Configuration of Profibus Upload Packet (Inbytes)

          109
    • 0

      109
      • Status flags—first byte

        109
    • 1

      109
      • Status flags—second byte

        109
    • 2

      109
      • Delivered power low

        109
    • 3

      109
      • Delivered power high

        109
    • 4

      110
      • Forward power low

        110
    • 5

      110
      • Forward power high

        110
    • 6

      110
      • Reflected power low

        110
    • 7

      110
      • Reflected power high

        110
    • 8

      110
      • Data byte (LSB)

        110
    • 9

      110
      • Data byte

        110
    • 10

      110
      • Data byte

        110
    • 11

      110
      • Data byte

        110
    • 12

      110
      • Data byte (MSB)

        110
    • 13

      110
      • Data field definition

        110
      • Bytes 0 and 1 of the upload packet contain information about the Apex generator; this information...

        110
      • Table 4-10. Upload Status Bytes

        110
      • First Status Bit

        110
      • Second Status Bit

        110
      • In the first status byte, bit 13 (the active toggle bit) indicates, the status of the Profibus in...

        110
      • In the packet, bytes 8, 9, 10, 11, and 12 comprise the “data field” and contain information defin...

        111
      • Profibus Command Set

        112
        • Table 4-11 lists the command set for the Profibus Host port.

          112
        • Table 4-11. Profibus Host Port Commands

          112
    • 1 RF off

      112
      • Requests RF output off; request is always honored regardless of which interface has control. (Rea...

        112
    • 0

      112
    • 2 RF on

      112
      • Requests RF output on; host control must have been selected.

        112
    • 0

      112
    • 3 regulation select

      112
      • Sets the method of output regulation (forward power—6, load—7, and ext—8). (Readback command is 1...

        112
    • 1 data byte 8-bit value

      112
    • 4 fwd pwr limit

      112
      • Specifies maximum forward power that can be delivered; accepts a value of 0 to 8000 W (for the 8 ...

        112
    • 2 data bytes 16-bit value

      112
    • 5 refl pwr limit

      112
      • Specifies maximum reflected power that can be tolerated; accepts a value of 0 to 20% of full rate...

        112
    • 2 data bytes 16-bit value

      112
    • 6 ext feedback limit

      112
      • Specifies the maximum external feedback level; accepts a value from 0 to the maximum external fee...

        112
      • This command sets the value at which the setpoint is limited during external regulation

        112
    • 2 data bytes 16-bit value

      112
    • 8 setpoint

      112
      • Specifies the output setpoint level for whatever method of output regulation has been selected. A...

        112
    • 2 data bytes 16-bit value

      112
    • 9 max ext feedback

      113
      • Specifies the external feedback value that corresponds to 10 V on the User2 port; requires data b...

        113
      • Second/third byte = a 16-bit value in the range of 500 to 5000.

        113
      • Fourth byte = the number of decimal places (0 to 4) used to display the external feedback signal ...

        113
    • 3 data bytes 16-bit value 8-bit value

      113
    • 11 select active target

      113
      • Specifies which target is active; accepts a value of 1 to 4. (Readback command is 156.)

        113
    • 1 data byte 8-bit value

      113
    • 12 set target life

      113
      • Sets the life (in kWh) of the active target. Requires three data bytes (24-bit value):

        113
      • Second, third, and fourth bytes = target life in kWh.

        113
      • Two decimals are implied—to get 1 kWh, send a value of 100.

        113
      • (Readback command is 157.)

        113
    • 3 data bytes 24-bit value

      113
    • 14 control transfer

      113
      • Sets the active control mode of the generator; possible choices are: 2 = host, 4 = User port (ana...

        113
    • 1 data byte 8-bit value

      113
    • 15 out-of- setpoint timer

      113
      • Specifies how long the generator can produce output that is not equal to the programmed setpoint ...

        113
    • 2 data bytes 16-bit value

      113
    • 16 allowable deviation

      113
      • Specifies a percentage that the generator can be out of setpoint before it starts the out-of- set...

        113
    • 1 data byte 8-bit value

      113
    • 128 supply type

      113
      • Requests the generator type; returns 4 ASCII characters.

        113
    • 0

      113
    • 4 data bytes 4 ASCII characters

      113
    • 129 supply size

      113
      • Requests the output capacity of the generator; returning packet contains 4 ASCII characters.

        113
    • 0

      113
    • 4 data bytes 4 ASCII characters

      113
    • 130 read mainframe software version number

      114
      • Requests the version number of the mainframe software. The returning packet contains 5 ASCII char...

        114
    • 0

      114
    • 5 data byte 5 ASCII characters

      114
    • 155 read control method

      114
      • Requests control mode (set by CMD 14). Returning values: 2 = host, 4 = analog.

        114
    • 0

      114
    • 1 data byte 8-bit value

      114
    • 156 read active target

      114
      • Requests the number of the active target (set by CMD 11).

        114
    • 0

      114
    • 1 data byte 8-bit value

      114
    • 157 read target life

      114
      • Requests the amount of life remaining (set by CMD 12) in the active target you specify. Two decim...

        114
    • 1

      114
    • 4 data bytes 32-bit value

      114
    • 162 read process status

      115
      • Requests report on process status; returning packet contains the following bytes arranged as foll...

        115
      • 1st status byte:

        115
      • 2nd status byte:

        115
      • 3rd status byte—fault flags:

        115
      • 4th status byte—fault flags:

        115
    • 4 data bytes four 8-bit values

      115
    • 164 read setpoint/ regulation mode

      116
      • Requests output setpoint level (set by CMD 8) and whatever method of output regulation has been s...

        116
      • First and second bytes = setpoint value.

        116
      • Third byte = method of output regulation.

        116
    • 0

      116
    • 3 data bytes 16-bit value 8-bit value

      116
    • 165 read forward power

      116
      • Requests a snapshot of forward power level at that instant.

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 166 read reflected power

      116
      • Requests a snapshot of reflected power level at that instant.

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 167 read delivered power

      116
      • Requests a snapshot of load power level at that instant.

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 168 read ext feedback (dc bias)

      116
      • Requests a snapshot of external feedback level at that instant.

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 169 read fwd pwr limit

      116
      • Requests programmed limit for forward power (set by CMD 4).

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 170 read refl pwr limit

      116
      • Requests reflected power limit (set by CMD5).

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 171 read ext feedback limit

      116
      • Requests external feedback limit (set by CMD6).

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 184 read out-of- setpoint interval

      116
      • Requests how long the generator is programmed to produce output that is not equal to the programm...

        116
    • 0

      116
    • 2 data bytes 16-bit value

      116
    • 185 read allowable deviation

      117
      • Requests what percentage the generator can be out of setpoint before it starts the out-of- setpoi...

        117
    • 0

      117
    • 1 data bytes 8-bit value

      117
    • 198 read mainframe software revision level

      117
      • Requests the revision level of the mainframe software. The returning packet contains three ASCII ...

        117
    • 0

      117
    • 3 data bytes 3 ASCII characters

      117
    • 205 read run time

      117
      • Requests the amount of time (in seconds) that the generator was producing output.

        117
    • 0

      117
    • 4 data bytes 32-bit value

      117
    • 206 read total energy output

      117
      • Requests the total amount of energy (in kWh) delivered by the generator.

        117
    • 0

      117
    • 4 data bytes 32-bit value

      117
  • Host Port—DeviceNet

    118
    • This section describes the DeviceNet Host port interface. To determine if your Apex unit has this...

      118
      • This section of the manual provides information for the: DeviceNet option PIN position 6, (A 1 2 ...

        118
    • The DeviceNet connector is either a 5-pin, male, Lumberg, RSF 5/0.5m or Turck FS 4.5.

      118
      • Figure 4-9. DeviceNet connector

        118
    • Table 4-12 describes the DeviceNet port pin signals.

      118
    • Table 4-12. Host Port DeviceNet Pins

      118
    • 1

      118
      • DRAIN

        118
      • Shield

        118
    • 2

      118
      • V+

        118
      • DeviceNet supply

        118
    • 3

      118
      • V-

        118
      • DeviceNet supply

        118
    • 4

      119
      • CAN_H

        119
      • DeviceNet data transmit/ receive

        119
    • 5

      119
      • CAN_L

        119
      • DeviceNet data transmit/ receive

        119
      • Analog inputs and outputs use the values and equations listed in Table 4-13 to define the voltage...

        119
      • Table 4-13. DeviceNet Voltage Ranges

        119
    • 0

      119
    • 0.000 V

      119
      • DeviceNet Interface Characteristics

        119
        • The device uses rotary switches to set the MAC ID. This allows you to visually verify the MAC ID ...

          119
        • The device is delivered with the baud rate set to 500 KBd which does not change if the device is ...

          119
        • The device supports the DeviceNet Duplicate MAC ID Check protocol.

          119
        • The device uses DeviceNet’s Group 2 I/O Poll Command message (and the associated Group 1 I/O Poll...

          119
        • Analog outputs automatically set the output voltages to 0 V if too much time elapses after the la...

          120
      • DeviceNet Rotary Switches: Baud Rate and Addressing

        120
        • The DeviceNet interface features three rotary switches, located on the rear, which are read each ...

          120
        • The signals available at the RS-232, AE Bus Host port conform to the RS-232 interface standards. ...

          120
          • Figure 4-10. DeviceNet control panel

            120
        • Use the MSD and LSD switches to select the unit’s address (MAC ID). MAC IDs 0 through 63 are vali...

          120
      • DeviceNet Control Panel LEDs

        120
        • The rear panel of the Apex generator features two, bi-color LEDs (see Figure 4-20). One is labele...

          120
      • Devicenet Module Status LED

        120
        • The MOD bi-color (amber/green) LED provides device status. It indicates whether the device has po...

          120
        • .

          121
        • Table 4-14. MOD Status LED

          121
        • Off

          121
        • No power

          121
        • the unit is not receiving power.

          121
        • Green (steady)

          121
        • Operational

          121
        • the unit is operating normally.

          121
        • Flashing Green

          121
        • Standby

          121
        • the unit needs maintenance because the configuration is missing, incomplete, or incorrect.

          121
        • Amber

          121
        • Unrecoverable Fault

          121
        • the unit has experienced a fault from which it cannot recover; you may need to replace the unit.

          121
        • Flashing Amber/Green

          121
        • Device Self-Testing

          121
        • the unit is running self diagnostics

          121
      • Devicenet Network Status LED

        121
        • The NET bi-color (amber/green) LED indicates the status of the communication link. The following ...

          121
        • Table 4-15. Network Status LED

          121
        • Off

          121
        • No power

          121
        • The unit is not on-line because:

          121
        • • it has not completed the Dup_MAC_ID test yet

          121
        • • it is not receiving power (check the MOD LED).

          121
          • Green (steady)

            121
          • Link okay

            121
          • The unit is on-line and allocated to the master

            121
          • Flashing green

            122
          • On-line, not connected

            122
          • The unit is on-line but has no connections in its existing state because:

            122
        • • the unit has no established connections to other nodes

          122
        • • the unit is not allocated to the master.

          122
          • Flashing amber

            122
          • Connection time-out, critical link failure

            122
          • One or more I/O connections are in the timed-out state.

            122
          • Amber

            122
          • Critical link failure

            122
          • Communication has failed; that is, the unit has detected an error that has made it incapable of c...

            122
          • For information about Module Status LED indications during power-up, refer to Section 8.2.4 of th...

            122
      • DeviceNet Operation

        122
        • You may operate your Apex generator either solely through the User port or through the optional D...

          122
        • Before operating your Apex generator through the DeviceNet port, ensure that your network is conn...

          122
        • DeviceNet is connected through pins 1, 10, 13, 14, and 15 of the User port (See table 4-1).

          123
        • When the generator powers up, it defaults to user control mode. However, engaging DeviceNet autom...

          123
        • Before operating your Apex generator through the DeviceNet port, ensure that your network is conn...

          123
      • DeviceNet Poll Command Message

        123
        • Note that this device uses DeviceNet’s Group 2 I/O Poll Command message (and the associated Group...

          123
        • Table 4-16. Poll Command Message

          123
    • 0

      123
    • Power Output Setpoint AI (LSB)

      123
    • 1

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • Power Output Setpoint AI (MSB)

      123
    • 2

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 3

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 0

      123
    • 4

      123
    • PO

      123
      • Power Output Setpoint 0 to 10 V; 10 V = full output power of the power supply

        123
        • PO = Power On 1 = turns power supply’s output ON 0 = turns power supply OFF

          123
      • DeviceNet Response Message

        123
        • Table 4-17 represents the structure of the response message.

          123
        • Table 4-17. Response Message

          124
    • 0

      124
    • Forward Power Sense AI (LSB)

      124
    • 1

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • Forward Power Sense AO (MSB)

      124
    • 2

      124
    • Reflected Power Sense A1 (LSB)

      124
    • 3

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • Reflected Power Sense AI (MSB)

      124
    • 4

      124
    • Not Used AI (LSB)

      124
    • 5

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • Not Used AI (MSB)

      124
    • 6

      124
    • Not Used AI (LSB)

      124
    • 7

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • 0

      124
    • Not Used AI (MSB)

      124
    • 8

      124
    • INTS

      124
    • TS

      124
    • SPS

      124
    • POS

      124
      • Forward Power Sense 0 to 10 V; 10 V = maximum rated power linear Reflected Power Sense 0 to 10 V;...

        124
  • Apex Status Indicators (LEDs)

    125
    • Some Apex generators provide the following status indicators on the front or rear panel. For pane...

      125
      • This section of the manual provides information for the: Passive digital display option PIN posit...

        125
    • Table 4-18. LED Status Indicators

      125
    • AC ON

      125
    • This green LED indicates that ac power is available within the generator and all three phases are...

      125
    • RF ON

      125
    • This green LED indicates that RF power is on (enabled). Depending on the selected setpoint value,...

      125
    • A flashing LED indicates an error. See “Troubleshooting guide” on page61.

      125
    • INTERLOCK

      125
    • When lit this green LED indicates that the required interlock criteria has been satisfied. The in...

      125
    • POWER LIMIT

      125
    • When lit, this yellow LED indicates that the generator is unable to supply the requested power le...

      125
    • OVERTEMP

      126
    • A flashing yellow LED warns that the internal cold plate temperature is approaching the shutdown ...

      126
    • A continuously lit LED indicates that the internal cold plate temperature has exceeded the allowa...

      126
    • ALARM

      126
    • This yellow LED indicates that the generator has turned off RF output due to some limit or alarm ...

      126
    • In the event of an alarm condition, after correcting the fault condition, an RF OFF signal has to...

      126
  • Apex Panel Illustrations

    126
    • The appearance of the front and real panels of the Apex generator is highly variable due to the n...

      126
      • Figure 4-11. Front Panel

        127
      • Figure 4-12. Rear panel

        128
• Installation, Setup, and Operation

  129
  • This chapter guides you through the process of installing, setting up, and operating an Apex gene...

    129
  • Because Apex generators are equipped with varying options, not all of the information in this cha...

    129
  • Installing the Generator

    129
    • The following sections provide information to help you install the Apex generator.

      129
  • Unpacking

    129
    • Unpack and inspect the generator carefully. Check for obvious physical damage. If no damage is ap...

      129
  • Grounding

    129
    • The unit provides two threaded grounding holes (one is a metric A-6, the other is a 5/16² x 18 US...

      129
  • Spacing Requirements

    130
    • The following diagram illustrates the spacing requirements in the installation of an Apex unit.

      130
      • Figure 5-1. Apex dimensions

        131
  • Mounting the Generator

    132
    • Refer to Figure 5-1 for dimensions used to properly mount the Apex generator.

      132
  • Connecting Cooling Water

    132
    • This generator is water cooled. Do not operate it until water is connected and the cooling requir...

      132
    • Apex water fittings vary depending on the option installed on the generator. Water fittings are i...

      132
    • To Connect Cooling Water:

      132
      • 1. Connect the input and output water connections and tighten securely.

        132
      • 2. Turn on the water and ensure that there are no leaks.

        132
      • 3. Be sure that the flow rate, pressure, and temperature are within the minimum specifications re...

        132
  • Installing the Optional Water Control

    132
    • The water control connector is a 2-pin, miniature, power jack, Switchcraft p/n L712A. Table 5-1 a...

      132
      • Figure 5-2. Water control connector

        133
      • Figure 5-3. Optional water solenoid connector

        133
    • Table 5-1. Water Control Connector Pins

      133
    • 1 (center pin)

      133
    • +24 V/1A (switched source to enable solenoid)

      133
    • 2 (outer pin)

      133
    • +24 V return

      133
  • Connecting Output Power

    133
    • Apex output connectors vary depending on the option installed on the generator. The output connec...

      134
    • There are five output connector options:

      134
    • Figure 5-4 provides a basic drawing of the output connectors.

      134
      • Figure 5-4. Output connector

        134
    • For all the output connectors, the center pin provides the RF output connection, while the outer ...

      134
  • Connecting Input Power

    134
    • Apex input power connectors vary depending on the option installed on the generator. The output c...

      134
    • ODU Connector

      135
      • The following section describes the ODU input connector. To determine if your Apex unit has this ...

        135
        • This section of the manual provides information for the: ODU input connector PIN position13, (A 1...

          135
      • Figure 5-5 shows the ODU input connector. The pin numbers are labeled in the illustration.

        135
        • Figure 5-5. ODU input connector

          136
      • Table 5-2 provides pin descriptions for the ODU input connector.

        136
      • Table 5-2. ODU Pin Descriptions

        136
      • 1

        136
      • Phase

        136
      • 2

        136
      • Phase

        136
      • 3

        136
      • Phase

        136
      • 4

        136
      • No connection

        136
      • 5 or Ground

        136
      • Ground

        136
    • NonTerminated, four-Conductor Pigtail

      136
      • The following section describes the nonterminated, four-conductor pigtail input options. To deter...

        136
        • This section of the manual provides information for the: Nonterminated, four-conductor pigtail in...

          137
      • Table 5-3 provides pin descriptions for the nonterminated, four-conductor input options.

        137
      • Table 5-3. Nonterminated, Four-Conductor Pin Descriptions

        137
      • 1

        137
      • Phase (black)

        137
      • 2

        137
      • Phase (black)

        137
      • 3

        137
      • Phase (black)

        137
      • Ground

        137
      • Green or Green/yellow stripe

        137
    • Harting Type Han-Q Connector

      137
      • The following section describes the Harting Type Han-Q input connector. To determine if your Apex...

        137
        • This section of the manual provides information for the: Harting Type Han-Q input connector PIN p...

          137
      • Figure 5-6 shows the Harting Type Han-Q input connector.

        138
        • Figure 5-6. Harting type Han-Q connector

          138
      • Table 5-4 provides pin descriptions for the Harting input connector.

        138
      • Table 5-4. Harting Type Han-Q Pin Descriptions

        138
      • 1

        138
      • Phase

        138
      • 2

        138
      • Phase

        138
      • 3

        138
      • Phase

        138
      • 4

        138
      • No connection

        138
      • 5

        138
      • EMI shield ground

        138
      • Gnd

        138
      • Safety earth ground

        138
  • Connecting I/O and Auxiliary Connectors

    138
    • The I/O and auxiliary connections that you make will depend on the options installed in your Apex...

      138
    • To Control the Generator Through a User Port

      139
      • Apex User port options are identified by PIN position 8, and they are discussed individually in “...

        139
      • To connect to the User port, install the appropriate I/O cable (cable requirements are identified...

        139
    • To Control the Generator through a Host port

      139
      • Apex Host port options are identified by PIN position 6, and they are discussed individually in “...

        139
        • 1. Ensure that the required User port inputs are satisfied. The required User port inputs are ide...

          139
        • 2. Connect and secure the appropriate serial cable to the Apex unit and the host (cable requireme...

          139
    • To Use the Common Exciter (CEX) Feature (optional)

      140
      • In the common exciter (CEX) mode of operation, more than one Apex generator is coupled into the s...

        140
      • When operating in CEX mode, one Apex unit is the “master” and the other is the “slave.” The CEX o...

        140
      • More than two slave generators can be locked together to a single master unit by “daisy chaining”...

        140
      • The phase relationship between the RF is fixed by the length of the cable used to interconnect th...

        140
  • First Time Operation

    140
    • The first time you operate the Apex generator do the following.

      140
      • 1. Use the preceding installation instructions to install the generator.

        140
      • 2. Turn on the system circuit breakers and apply ac input to the unit.

        140
      • 3. When the generator received ac input, it performs self-diagnostics. If the POWER LIMIT LED fla...

        140
      • 4. Verify that the AC ON LED is lit. If it isn’t lit, see “Troubleshooting guide” on page61.

        140
      • 5. Verify that the Alarm LED is not lit. If it is lit, see “Troubleshooting guide” on page61.

        141
      • 6. Verify that the Interlock LED is lit. If it is not lit, See “Troubleshooting guide” on page61.

        141
      • 7. Send RF On command and verify that the RF ON LED is on. If it is flashing or is not lit, see “...

        141
      • 8. Request a setpoint and verify that the Power Limit LED is not lit. If it is lit, see “Troubles...

        141
      • 9. If the Apex unit is delivering power and the power limit LED is not lit, the unit is functioni...

        141
  • Normal Operation

    141
    • Each time the generator is powered on, the self-diagnostics procedure is done to ensure the gener...

      141
    • Specific operating techniques vary depending on the control and monitoring interface. If you are ...

      141
  • Understanding and Setting Up Pulsing Output

    141
    • As of January 2001, only the AEBus Host Port (PIN 6 option 0) supports pulsing. Add info about co...

      141
    • Some Apex units have a pulsing option, which allows you to produce either pulsed RF output or sta...

      141
      • This section of the manual provides information for the: Pulsing option PIN position 14, (A 1 2 3...

        142
    • For units that have the pulsing option, pulsing output can be enabled or disabled. All pulsing se...

      142
  • Understanding Pulsing

    142
    • When pulsing is enabled, the Apex generates pulses of RF output based on frequency and duty-cycle...

      142
  • Enabling and Setting Pulsing

    142
    • To enable pulsing, send a valid set of frequency and duty cycle settings to the Apex generator (s...

      142
    • Pulsing settings are not saved when the Apex unit is turned off. To return pulsing settings to de...

      142
• Troubleshooting and Customer Support

  143
  • This Chapter addresses the troubleshooting of the Apex unit. It can be used best by knowing what ...

    143
  • • “Troubleshooting Questions” on page63: This section contains questions that can be easily ans...

    143
  • • “Troubleshooting Procedures” on page64: This section explains the procedures needed to get yo...

    143
  • • “AC On LED not Lit” on page64: This section contains a full list of codes and how they can be...

    143
  • • “AE Customer Support” on page611: This section provides phone numbers and addresses for AE su...

    143
  • Troubleshooting guide

    143
    • Before calling AE Customer Support, perform the following steps or procedures. Use this section i...

      143
  • Checks with the Power Off

    143
    • Before troubleshooting the Apex unit make sure the following are completed:

      143
      • 1. Ensure the power to the unit is off.

        143
      • 2. Check for visible damage to the unit, cables, and connectors.

        143
      • 3. Ensure all unit connectors are installed correctly and are fastened tightly.

        143
      • 4. Check to determine whether any system-related circuit breakers have been tripped.

        144
      • 5. Ensure there is input power to the unit, and ensure the input power meets specifications.

        144
      • 6. Ensure ground connections are adequate and secure.

        144
  • Troubleshooting Questions

    145
    • This section lists the steps necessary to get the unit on. Before working through the following q...

      145
    • Use the following troubleshooting questions to troubleshoot the Apex generator.

      145
      • 1. Is the AC On LED lit?

        145
      • 2. Is the Alarm LED lit?

        145
      • 3. Is the Overtemp LED flashing?

        145
      • 4. Is the Interlock LED lit?

        145
      • 5. Is the RF ON LED flashing?

        145
      • 6. Is RF ON LED lit?

        145
      • 7. Is the Power Limit LED lit?

        146
  • Troubleshooting Procedures

    146
    • The following section describes the procedures involved in troubleshooting. Use this section to h...

      146
  • AC On LED not Lit

    146
    • When the AC On LED is not lit, see Electrical Specifications on page35. There also may be an ex...

      146
  • Alarm LED Lit

    146
    • When Alarm LED is lit, this means a error has been detected. This is be caused by a fault which c...

      146
  • Overtemp LED on Solid

    146
    • When the Overtemp LED is on solid, the internal cold plate temperature has exceeded the allowable...

      146
    • To avoid this condition, make sure the unit is receiving proper cooling as outlined in the Coolan...

      146
  • Overtemp LED is Flashing

    146
    • When flashing, this indicator shows that the internal cold plate temperature is approaching the s...

      146
    • Take precautions by ensuring that the unit receiving proper cooling as outlined in the Coolant Sp...

      146
  • Interlock LED is not Lit

    147
    • When the AC On LED is lit and the Interlock LED is not lit, either the interlock is not satisfied...

      147
    • To satisfy the interlock, make sure the RF output cover is firmly attached and ensure the interlo...

      147
  • RF ON LED Flashing

    147
    • The RF On LED will flash under the following conditions:

      147
  • Power Limit LED is Lit

    147
    • When lit, the power limit LED indicates that the generator is unable to supply the requested powe...

      147
    • To troubleshoot this error indication, disable the output and rear circuit breaker (if your Apex ...

      147
  • External Load Checks - Open/Short RF Output Path

    148
    • Use extreme caution as this section is involves troubleshooting the output of the unit.

      148
    • There are 4 basic components that could impede the RF path: the Apex unit output connector, the o...

      148
      • 1. Turn the rear circuit breaker off to ensure that there is no RF power at the output of the unit.

        148
      • 2. For the Apex output connector

        148
        • a. Remove the output cable and visually inspect the output connector for signs of arcing or heat ...

          148
        • b. Verify an open is measured between the center conductor and outer shield.

          148
        • c. Make sure the output connector is mounted firmly to the chassis.

          148
      • 3. For the output cable

        148
        • a. Visually make sure there is a good connection between the output cable and end connectors on b...

          148
        • b. Verify the continuity of the center conductor.

          148
        • c. Verify the continuity of the outer shield.

          148
        • d. Verify that there is no continuity between the center conductors and outer shields.

          148
        • e. Swap cables if possible and retry operating the Apex.

          148
      • 4. For the tuner and the chamber

        148
      • The only way to truly isolate the tuner or the chamber is to swap the tuner or the Apex unit with...

        148
    • Also consider these questions:

      148
      • 1. Are you currently setting up a new chamber system?

        148
      • 2. Has any work been done recently on the chamber?

        148
      • 3. Have there been any changes in your process recently?

        148
      • 4. Is your reflected power readings close to the Apex reflected power limit? See “Electrical Spec...

        148
    • If you answered yes to any one of the previous questions and the Apex passed the Internal Diagnos...

      149
  • Error Codes

    149
    • Error codes indicate a fault condition and report the most recent active error or alarm condition...

      149
    • Table 6-1. Error Code Table

      149
    • E000

      149
    • No Error

      149
    • E001 Out of setpoint timer expired

      149
    • If the unit is unable to reach or maintain the programmed output level within a specified amount ...

      149
    • To avoid this error, you can disable the timer, increase the amount of allowable time, or try to ...

      149
    • To clear this error code, you must send an RF OFF command to reset the Apex unit.

      149
    • E004 Over Temperature Shutdown

      149
    • This error is the same as when the Overtemp LED is on solid,

      149
    • See “Overtemp LED on Solid” on page64.

      149
    • E009 contactor failed to close

      150
    • This contactor is part of the input section that follows the interlock condition. The contactor i...

      150
    • Call AE Global Support.

      150
    • E011 Low bus voltage limit

      150
    • The bus voltage is basically rectified input voltage. If the bus voltage measures too low (E011) ...

      150
    • Send RF OFF command to reset the error code. If you receive one of these error codes, make sure t...

      150
    • E012 High bus voltage limit

      150
    • The bus voltage is basically rectified input voltage. If the bus voltage measures too low (E011) ...

      150
    • If you receive one of these error codes, make sure that your input voltage is within specificatio...

      150
    • E016 Current limit

      150
    • This usually indicates an internal failure.

      150
    • Call AE Global Support

      150
    • E017 EEPROM failure

      150
    • This verifies that the option called out in PIN position 6 is actually installed.

      150
    • Call AE Global Support.

      150
    • E020 User interlock open

      151
    • When the AC On LED is lit and the Interlock LED is not lit, this means either the interlock is no...

      151
    • Make sure that the RF output cover is firmly attached and ensure the interlock pins on the User p...

      151
    • or

      151
    • See “Interlock LED is not Lit” on page65.

      151
    • E025 Target life expired

      151
    • When the user set target life ends, this error code is reported. The output will not be turned of...

      151
    • Set new target life then send RF On command to reset unit.

      151
    • E029 Ripple Current Error (missing phase)

      151
    • The input line voltage is rectified internally to a bus voltage. The Apex generator monitors the ...

      151
    • Verify that all three phases are present on the input voltage lines and that the plasma is stable...

      151
    • E033 Temperature Rate Threshold error

      151
    • The Apex unit monitors the rate at which the cold plate temperature is changing. If the temperatu...

      151
    • To clear the error, send RF OFF command to reset the unit; if error code does not clear or if the...

      151
    • E050 DeviceNet Error

      152
    • DeviceNet error

      152
    • Verify DeviceNet cable is connected

      152
    • E051 Profibus Watch Dog expired

      152
    • PROFIBUS watch dog expired

      152
    • Have the master reestablish communications and send a “master reset” to clear the error. See “Pro...

      152
    • E054 Profibus SPC has taken itself off-line

      152
    • Profibus SPC has taken itself off-line

      152
    • Cycle the Apex unit’s power off and on and reestablish communications between the master and the ...

      152
    • E055 Profibus memory buffer overflow

      152
    • Profibus memory buffer overflow

      152
    • Increase the time between packets being sent to the unit via the Profibus master. See “Host Port—...

      152
    • E059 Profibus master released slave

      152
    • Profibus master released slave

      152
    • To recover from the “off state,” have a Profibus master establish communications with the Apex un...

      152
    • E101 Measurement PCB ID is incorrect

      152
    • This indicates a configuration error.

      152
    • Call AE Global Support.

      152
    • E105

      153
    • User setpoint scale factor does not match

      153
    • This indicates a configuration error.

      153
    • Call AE Global Support.

      153
    • E111

      153
    • Overtemp warning or shutdown value is out of range

      153
    • This indicates a configuration error.

      153
    • Call AE Global Support.

      153
  • AE Customer Support

    153
    • Table 6-2. Global Support Locations

      153
    • AE, World Headquarters

      153
    • 1625 Sharp Point Drive Fort Collins, CO 80525 USA

      153
    • Phone: 800.446.9167 or 970.221.0108 or 970.221.0156

      153
    • Fax: 970.407.5981

      153
    • Email: technical.support@aei.com

      153
    • AE, Voorhees, NJ

      153
    • 1007 Laurel Oak Road Voorhees, NJ 08043 USA

      153
    • Phone: 800.275.6971 or 856.627.6100

      153
    • Fax: 856.627.6159

      153
    • AE, California

      153
    • 491 Montague Expressway Milpitas, CA 95035 USA

      153
    • Phone: 408.263.8784

      153
    • Fax: 408.263.8992

      153
    • AE, Austin

      153
    • 8900 Cameron Road Suite 100 Austin, TX 78754

      153
    • Phone: 512.231.4200

      153
    • Fax: 512.719-9042

      153
    • AE, GmbH

      154
    • Raiffeisenstrasse 32 70794 Filderstadt (Bonlanden) Germany

      154
    • Phone: 49.711.77927.0

      154
    • Fax: 49.711.7778700

      154
    • AE, Japan KK

      154
    • TOWA Edogawabashi Bldg. 347 Yamabuki-cho Shinjuku-ku, Tokyo Japan

      154
    • Phone: 81.3.32351511

      154
    • Fax: 81.3.32353580

      154
    • AE, Korea Ltd.

      154
    • Gongduk Building, 4th floor 272-6 Seohyun-Dong, Bundang-Gu, Sungam Si Kyunggi, 463-050 Korea

      154
    • Phone: 82.31.705.1200

      154
    • Fax: 82.31.705.276

      154
    • AE, United Kingdom

      154
    • Unit 5, Minton Place, Market Court, Victoria Road Bicester, Oxon OX6 7QB UK

      154
    • Phone: 44.1869.320022

      154
    • Fax: 44.1869.325004

      154
    • AE, Taiwan, Ltd.

      154
    • 10F-6, No. 110, Chung Shan Rd. Sec. 3, Chungho City, Taipei Hsien Taiwan 235

      154
    • Phone: 886-2-82215599

      154
    • Fax: 886-2-82215050

      154
    • AE, China

      154
    • Rm. 910 Anhui Building, No. 6007 Shennan Road, Shenzhen, China 518040

      154
    • Phone: 86-755-3867986

      154
    • Fax: 86-755-3867984

      154
  • Returning Units for Repair

    154
  • Warranty

    155
  • Authorized Returns

    155
  • Warranty Statement

    156
    • Index

      157
    • Symbols

      157
    • Numerics

      157
    • A

      157
    • B

      157
    • C

      157
    • D

      158
    • E

      158
    • F

      158
    • G

      158
    • H

      158
    • I

      158
    • L

      158
    • M

      159
    • N

      159
    • O

      159
    • P

      159
    • R

      159
    • S

      159
    • T

      160
    • U

      160
    • W

      160
    • X

      160